基于单晶硅的压阻效应压力传感器低气压输出异常分析  

Analysis of abnormal output of pressure sensor based on piezoresistive effect of monocrystalline silicon at low air pressure

作　　者：刘宝伟 王振廷 宁金明 陈宝成 王元委 毕宏宇 LIU Baowei;WANG Zhenting;NING Jinming;CHEN Baocheng;WANG Yuanwei;BI Hongyu(The 49th Research Institute of China Electronics Technology Group Corporation,Harbin 150028,China)

机构地区：[1]中国电子科技集团公司第四十九研究所,黑龙江哈尔滨150028

出　　处：《传感器与微系统》2024年第10期15-18,共4页Transducer and Microsystem Technologies

摘　　要：某型号压阻式压力传感器在实际工程中出现低气压段输出偏高现象,结合该传感器的结构组成,建立导致该现象的故障树,依据故障树逐一进行排除,采用外观检查、绝缘电阻测试、替换可能的故障部件等方式,确定故障出现在压力芯体中;进一步对芯体进行分析,通过显微镜、手捻法等方式方法,确定硅油中存在气泡导致传感器低气压段输出偏高,并对气泡中压力与输入压力之间的3类关系进行分析,得到输入压力小于气泡内部压力时,低气压段输出偏高故障现象的失效机理,并通过在空气环境下封装压力芯体,复现了故障现象,并建议增加对压力芯体进行低温低气压筛选试验。A certain type of piezoresistive pressure sensor exhibits a higher output in the low-air pressure section in actual engineering.Considering the structural composition of this sensor,a fault tree causing this phenomenon is established.Exclusions are carried out one by one based on the fault tree by means of appearance inspection,insulation resistor test,and replacement of possible faulty components.It is analyzed determined that the fault occurrs in the pressure core.Further,the core is analyzed through methods such as microscope and the handtwisting method.It is determined that the presence of bubbles in the silicone oil lead to the higher output of the sensor in the low-pressure section.The three types of relationships between the pressure in the bubbles and the input pressure are analyzed.The failure mechanism of the higher output in the low-pressure section when the input pressure is less than the internal pressure of the bubbles is obtained.The fault phenomenon is reproduced by encapsulating the pressure core in an air environment.It is suggested to increase the low temperature and low-air pressure screening test on the pressure core.

关 键 词：压阻效应 压力传感器 低气压输出 压力芯体 气泡 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]