面向聚变中子探测的宽禁带半导体探测器关键问题与研究挑战  

Key Issue and Research Challenges of Wide Bandgap Semiconductor Detectors for Fusion Neutron Detection

作　　者：苏凯 张金风[1,2] 张逸韵[3] 蒋树庆[4] 郭辉[1,2] 张进成[1,2] 郝跃[1,2] SU Kai;ZHANG Jin-feng;ZHANG Yi-yun;JIANG Shu-qing;GUO Hui;ZHANG Jin-cheng;HAO Yue(State Key Laboratory of Wide Band-gap Semiconductor Devices and Integrated Technology,Faculty of Integrated Circuit,Xidian University,Xi’an,Shaanxi 710071,China;National Engineering Research Center of Wide Band-gap Semiconductor,Xidian University,Xi’an,Shaanxi 710071,China;Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;Institute of Nuclear Physics and Chemistry,China Academy of Engineering Physics,Mianyang,Sichuan 621900,China)

机构地区：[1]西安电子科技大学集成电路学部宽禁带半导体器件与集成技术全国重点实验室,陕西西安710071 [2]西安电子科技大学宽禁带半导体国家工程研究中心,陕西西安710071 [3]中国科学院半导体研究所,北京100083 [4]中国工程物理研究院核物理与化学研究所,四川绵阳621900

出　　处：《电子学报》2024年第8期2933-2938,共6页Acta Electronica Sinica

基　　金：国家自然科学基金(No.62134006,No.62204193,No.62127812,No.62374122);国家重点研发计划(No.2022YFB3608600);中国博士后科学基金(No.2021TQ0256)。

摘　　要：近年来国际聚变反应研究获得重大进展,选择抗位移能力强的宽禁带半导体探测器是推动聚变研究的关键技术之一.金刚石超宽禁带半导体具备卓越抗辐照和时间响应等特性,是聚变诊断特别是高能中子诊断的理想材料,碳化硅宽禁带半导体也可测量中子,且大尺寸外延技术更成熟,可覆盖聚变研究装置上的大规模应用.通过这两种宽禁带半导体辐射探测器的研究并实现自主可控的高性能器件制备,将显著提高我国核聚变反应测量系统的性能,支持我国在未来的全球能源革命中处于领先优势.本文将对这两种宽禁带半导体探测器在聚变中子探测应用场景下研制的关键问题和研究挑战进行探讨,助力我国聚变能源开发和应用.In recent years,significant progress has been made in international fusion reaction research.The neutron detection technology which can meet requirements of nuclear energy systems such as controlled fusion reactors featuring high-energy and high-dose radiation has always been one of the core technologies in fusion research and application.Choos⁃ing wide bandgap semiconductor materials with strong radiation hardness to develop radiation detectors is an inevitable re⁃quirement for the development of radiation detectors in fusion installation.Diamond has excellent radiation hardness and ul⁃tra-fast time response,and is considered an ideal semiconductor material for fusion detection,especially for high-energy neutron diagnosis.Silicon carbide is also qualified to directly measure fusion neutrons,and its large-size epitaxial growth technology is quite mature.Large-area and highly sensitive neutron detectors prepared using silicon carbide can cover largescale applications in fusion research installation.By studying these two types of wide bandgap semiconductor radiation de⁃tectors and achieving completely self-dependent preparation of high-performance devices,we can significantly improve the performance of China’s nuclear fusion reaction measurement systems,and support China standing at the leading edge in the future global energy revolution.Therefore,this article will elaborate on the key issues and research challenges in the development of these two wide bandgap semiconductor detectors in the application scenarios of fusion neutron detection,to assist in the development and application of fusion energy in China.

关 键 词：中子探测器 金刚石 碳化硅 能量分辨 脉冲响应 

分 类 号：TN3[电子电信—物理电子学] TM23[一般工业技术—材料科学与工程] TL814[电气工程—电工理论与新技术]