基于无透镜傅里叶变换数字全息的结构形貌测量  

Structural morphology measurement based on lens-less Fourier transform digital holography

作　　者：张娅雅 段俊萍[2] 张斌珍[2] ZHANG Yaya;DUAN Junping;ZHANG Binzhen(Shanxi Institute of Science and Technology,Jincheng Shanxi 048000,China;Science and Technology on Electronic Test&Measurement Laboratory,North University of China,Taiyuan 030051,China)

机构地区：[1]山西科技学院,山西晋城048000 [2]中北大学仪器科学与动态测试教育部重点实验室,太原030051

出　　处：《光通信技术》2024年第5期91-96,共6页Optical Communication Technology

基　　金：国家自然科学基金项目(5217555)资助;山西省基础研究计划资助项目(202203021222336)资助;山西省高等学校教学改革创新立项项目(J20231863)资助。

摘　　要：为了精确测量物体的形貌信息,提出了一种基于无透镜傅里叶变换数字全息的成像系统。首先,分析了无透镜傅里叶变换数字全息的成像原理,引入了倾斜平面校正方法;然后,搭建了成像系统平台,通过实验验证系统的成像性能。实验结果表明:系统的实际分辨率为57.02 lp/mm。测量结果的相对误差仅为3.95%,充分验证了该系统卓越的成像性能。In order to accurately measure the morphology information of objects,an imaging system based on lensless Fourier transform digital holography is proposed.Firstly,the imaging principle of lensless Fourier transform digital holography was analyzed,and a tilt plane correction method was introduced.Then,an imaging system platform was built and the imaging performance of the system was verified through experiments.The experimental results show that the actual resolution of the system is 57.02 lp/mm.The relative error of the measurement results is only 3.95%,fully verifying the excellent imaging performance of the system.

关 键 词：数字全息 形貌测量 相衬成像 反射式成像 无透镜傅里叶变换成像 

分 类 号：O436[机械工程—光学工程] TN305.7[理学—光学]