长跨距运动龙门碳化硅陶瓷气浮定导轨优化设计  

Optimization Design of Air Floating Beam for Long-Span Moving Gantry

作　　者：党景涛 裴兵全 王洪洲 DANG Jingtao;PEI Bingquan;WANG Houzhou(The 45th Research Institute of CETC,Beijing 100176,China)

机构地区：[1]中国电子科技集团公司第四十五研究所,北京100176

出　　处：《电子工业专用设备》2024年第5期52-56,72,共6页Equipment for Electronic Products Manufacturing

摘　　要：芯片拼接系统用长跨距运动龙门气浮定导轨的材质、长度尺寸和加工精度直接决定了设备稳定性、拼接能力和拼接精度。通过计算机辅助设计与分析软件进行了长跨距运动龙门碳化硅陶瓷气浮定导轨的静力学仿真、结构优化和校核,对芯片拼接系统用碳化硅陶瓷气浮定导轨的研发设计起到了很好的理论指导作用。In the chip splicing system,the material,length and accuracy of the long-span gantry air floating beam directly determine the stability,splicing ability and splicing accuracy of the equipment.In this paper,statics simulation,structure optimization and check are carried out based on CAD and CAE software,which plays an important role in the design of long-span gantry air floating beam.

关 键 词：芯片拼接系统 气浮定导轨 结构优化 

分 类 号：TN305[电子电信—物理电子学]