压电效应与主动制振技术研究  

Technology of Piezoelectric Structure Using for Active Vibration Control

作　　者：杨师[1] 路继松 赵宏宇 景亚慧 程一启 YANG Shi;LU Jisong;ZHAO Hongyu;JING Yahui;CHENG Yiqi(The 45th Research Institute of CETC,Beijing 100176,China)

机构地区：[1]中国电子科技集团公司第四十五研究所,北京100176

出　　处：《电子工业专用设备》2024年第5期57-62,共6页Equipment for Electronic Products Manufacturing

摘　　要：介绍了压电陶瓷促动器与传感器的基本结构与特征;概括了压电堆叠结构制备工艺、主要生产厂商及应用压电陶瓷进行主动减振的发展过程与结构特征;针对应用于精密半导体设备的典型减振结构进行了压电堆叠选型与动态力计算;对减振结构单体进行了有限元建模及刚度仿真分析。The basic structure and characteristics of piezoelectric ceramic actuator and sensor are introduced in this paper.The fabrication process and main manufacturers of piezoelectric stack structure are summarized in this paper,the development and structural characteristics of active vibration reduction using piezoelectric ceramics for precision equipment are described.The type selection and dynamic force calculation of piezoelectric stack are carried out for typical vibration absorption structure,and the finite element modeling and stiffness simulation analysis of vibration absorption structure are carried out.

关 键 词：精密设备 压电陶瓷 主动减振 

分 类 号：TN605[电子电信—电路与系统]