氮气流量对氮化钛涂层微观结构与性能的影响  

Influence of Nitrogen Flow Rate on Microstructure and Properties of Titanium Nitride Coatings

作　　者：李健智 李文元[1] 潘旭 罗侃 丁泽良[1] LI Jianzhi;LI Wenyuan;PAN Xu;LUO kan;DING Zeliang(College of Mechanical Engineering,Hunan University of Technology,Zhuzhou Hunan 412007,China)

机构地区：[1]湖南工业大学机械工程学院,湖南株洲412007

出　　处：《包装学报》2024年第5期18-27,51,共11页Packaging Journal

基　　金：湖南省自然科学基金资助项目(2023JJ50163)。

摘　　要：采用直流反应溅射技术在Ti6Al4V钛合金表面制备了不同氮气流量的氮化钛涂层,通过场发射扫描电子显微镜、X射线衍射仪、X射线光电子能谱仪、划痕仪和电化学工作站对涂层进行测试,研究了氮气流量对涂层微观结构与性能的影响。结果表明:当氮气流量为0.3 mL/min时,涂层呈非晶结构;氮气流量为0.5~3.5 mL/min时,涂层中存在氮氧化钛晶相。随着氮气流量的增大,涂层中的N元素含量减少,O元素含量增加,涂层的厚度减小,致密性、耐蚀性和界面结合增强。Titanium nitride coatings were prepared on Ti6Al4V titanium alloy via DC reactive sputtering technology at different nitrogen flow rates.The coating was characterized by scanning electron microscope(SEM),X-ray diffractometer(XRD),X-ray photoelectron spectroscopy(XPS),scratch tester,and electrochemical workstation to investigate the influence of nitrogen flow rate on the coating’s microstructure and properties.Results indicate that at 0.3 mL/min nitrogen flow rate,the coating exhibits an amorphous structure,while at 0.5~3.5 mL/min,there is a titanium nitrogen oxide crystal phase.As the nitrogen flow rate increases,the N element content in the coating decreases,the O element content increases,the coating thickness decreases,and the density,interface bonding,and corrosion resistance are enhanced.

关 键 词：TI6AL4V 直流反应溅射 氮化钛涂层 结合力 耐蚀性 

分 类 号：TG174.4[金属学及工艺—金属表面处理]