Discharge mode and particle transport in radio frequency capacitively coupled Ar/O_(2) plasma discharges  

作　　者：Zhuo-Yao Gao Wan Dong Chong-Biao Tian Xing-Zhao Jiang Zhong-Ling Dai Yuan-Hong Song 高卓瑶;董婉;田崇彪;蒋星照;戴忠玲;宋远红(Key Laboratory of Materials Modification by Laser,Ion,and Electron Beams(Ministry of Education),School of Physics,Dalian University of Technology,Dalian 116024,China)

机构地区：[1]Key Laboratory of Materials Modification by Laser,Ion,and Electron Beams(Ministry of Education),School of Physics,Dalian University of Technology,Dalian 116024,China

出　　处：《Chinese Physics B》2024年第9期451-460,共10页中国物理B（英文版）

基　　金：the National Natural Science Foun-dation of China(Grant Nos.12020101005,11975067,and 12347131);the Fundamental Research Funds for the Cen-tral Universities(Grant No.DUT24BS069).

摘　　要：Simulations are conducted on capacitively coupled Ar/O_(2)mixed gas discharges employing a one-dimensional fluid coupled with an electron Monte Carlo(MC)model.The research explores the impact of different O_(2)ratio and pressures on the discharge characteristics of Ar/O_(2)plasma.At a fixed Ar/O_(2)gas ratio,with the increasing pressure,higher ion densities,as well as a slight increase in electron density in the bulk region can be observed.The discharge remains dominated by the drift-ambipolar(DA)mode,and the flux of O(3P)at the electrode increases with the increasing pressure due to higher background gas density,while the fluxes of O(1D)and Ardecrease due to the pronounced loss rate.With the increasing proportion of O_(2),a change in the dominant discharge mode from a mode to DA mode can be detected,and the O_(2)-associated charged particle densities are significantly increased.However,Ar+density shows a trend of increasing and then decreasing,while for neutral fluxes at the electrode,Arflux decreases,and O(3P)flux increases with the reduced Ar gas proportion,while trends in O(1D)flux show slight differences.The evolution of the densities of the charged particle and the neutral fluxes under different discharge parameters are discussed in detail using the ionization characteristics as well as the transport properties.Hopefully,more comprehensive understanding of Ar/O_(2)discharge characteristics in this work will provide a valuable reference for the industry.

关 键 词：Ar/O_(2) mixed gas discharges electron dynamics transport of charged and neutral particles 

分 类 号：O53[理学—等离子体物理]