干式螺杆真空泵的理论研究进展  

Recent Theoretical Research Progress in Dry Screw Vacuum Pump

作　　者：吴俊 吴杰 干蜀毅[3] 何海斌 王雷 吴青云 WU Jun;WU Jie;GAN Shu-yi;HE Hai-bin;WANG Lei;WU Qing-yun(Ningbo C.S.I.Power&Machinery Group Co.,Ltd.,Ningbo 315000,China;Ningbo ULVAC Vacuum Technology Co.,Ltd.,Ningbo 315000,China;School of Mechanical Engineering,Hefei University of Technology,Hefei 230009,China)

机构地区：[1]宁波中策动力机电集团有限公司,浙江宁波315000 [2]宁波爱发科真空技术有限公司,浙江宁波315000 [3]合肥工业大学机械工程学院,安徽合肥230009

出　　处：《真空》2024年第5期36-45,共10页Vacuum

基　　金：国家自然科学基金青年项目(52205193)。

摘　　要：由于干式双螺杆真空泵具有工作压强范围宽、抽速大、可抽除水蒸气和固体粉尘、性能稳定等独特优势,目前已广泛应用于半导体、石油化工、光伏新能源等热门行业,具有广阔的市场前景,引起了国内外的广泛关注。本文基于国内外研究论文和专利资料,从螺杆转子端面型线设计、变螺距和变截面的内压缩设计、动平衡设计、计算流体力学和热力学工作性能分析等研究角度,全面综述了干式双螺杆真空泵的理论研究进展,为螺杆真空泵领域的研究工作提供参考。Due to the unique advantages such as wide working pressure range with high pumping speed,ability to remove water vapor and solid particle,and stable performance,dry twin-screw vacuum pumps have been widely used in popular industries such as semiconductors,petrochemicals,and photovoltaic new energy.They have broad market prospects and have attracted widespread attention.This article comprehensively summarizes the recent theoretical research progress of dry twin-screw vacuum pumps from the perspectives of screw rotor end profile design,variable pitch and profile internal compression design,dynamic balance design,computational fluid dynamics and thermodynamic performance analysis based on recent research papers and patents.This review can provide reference for research in the field of screw vacuum pumps.

关 键 词：螺杆真空泵 转子型线 内压缩设计 动平衡设计 工作性能分析 

分 类 号：TB752[一般工业技术—真空技术]