硅酸钛钡高温压电晶体及其传感器件研究进展  

Research progress in fresnoite high-temperature piezoelectric crystal and its sensors

作　　者：李亚楠[1] 彭向康 姜超 赵显[1,3] 于法鹏 LI Yanan;PENG Xiangkang;JIANG Chao;ZHAO Xian;YU Fapeng(School of Crystal Materials,Shandong University,Jinan 250100,China;Shenzhen Institute of Advanced Technology,Chinese Academy of Sciences,Shenzhen 518000,Guangdong,China;Center for Optics Research and Engineering,Shandong University,Qingdao 266200,Shandong,China;Shandong Xingang Electronics Technology Co.,Ltd.,Weifang 261000,Shandong,China)

机构地区：[1]山东大学晶体材料研究院,济南250100 [2]中国科学院深圳先进技术研究院,广东深圳518000 [3]山东大学光学高等研究中心,山东青岛266200 [4]山东新港电子科技有限公司,山东潍坊261000

出　　处：《材料工程》2024年第9期1-10,共10页Journal of Materials Engineering

基　　金：国家自然科学基金(52372008);山东省自然科学基金(ZR2020KA003,ZR2023QE165)。

摘　　要：压电材料作为重要的功能材料,由其制备的结构健康检测器件已被广泛应用于国民经济的诸多领域。随着现代工业技术特别是航空航天、核电能源和智能制造等的发展,各类高温工况环境对压电材料的性能提出了更高的要求,因此研制综合性能优异的高温压电材料并将其应用到具有更高服役温度的传感器件中受到了研究者的广泛关注。硅酸钛钡(Ba_(2)TiSi_(2)O_(8),BTS)晶体具有较高的电阻率、较低的介电损耗和优良的压电性能,是一种具有良好应用前景的高温压电单晶材料。本文主要介绍了BTS晶体的提拉法生长制备工艺、单晶电弹性能表征、材料相变调控以及采用该晶体为核心元件研制的声表面波传感器和高温振动传感器的研究进展,最后对新型高温压电晶体及其传感器件的研发进行了总结和展望。Piezoelectric materials,as important functional materials,have been widely used in various fields of the national economy for the preparation of structural health detection devices.With the development of modern industrial technology,especially aerospace,nuclear energy,and intelligent manufacturing,various high-temperature conditions have put forward higher requirements for the performance of piezoelectric materials.Therefore,the development of high-temperature piezoelectric materials with excellent comprehensive performance and their application in sensor devices with higher service temperatures have received widespread attention from researchers.Fresnoite(Ba_(2)TiSi_(2)O_(8),BTS)crystal is a kind of promising piezoelectric material for high-temperature sensing applications due to its high electrical resistivity,low dielectric loss,and excellent piezoelectric properties.The preparation process of BTS crystal by Czochralski method,characterization of single crystal electro-elastic properties,phase transition regulation,and the research progress of surface acoustic wave sensors and high-temperature vibration sensors based on BTS piezoelectric crystal were introduced in this paper.Finally,the research and development of new high-temperature piezoelectric crystals and their sensors were summarized and presented.

关 键 词：硅酸钛钡晶体 提拉法 晶体生长 相变调控 高温压电传感器 

分 类 号：O738[理学—晶体学]