基于磁控溅射的Pt/PtRh高温薄膜热电偶传感器集成工艺  

Integration technique of Pt/PtRh hightemperature thin film thermocouple sensors fabricated via magnetron sputtering

作　　者：张文琦 沈统 王林斌 赵未昀 邓元 ZHANG Wenqi;SHEN Tong;WANG Linbin;ZHAO Weiyun;DENG Yuan(Key Laboratory of Intelligent Sensing Materials and Chip Integration Technology of Zhejiang Province,Hangzhou Innovation Institute of Beihang University,Hangzhou 310052,China;Research Institute for Frontier Science,Beihang University,Beijing 100083,China)

机构地区：[1]北京航空航天大学杭州创新研究院浙江省智能传感材料与芯片集成技术重点实验室,杭州310052 [2]北京航空航天大学前沿科学技术创新研究院,北京100083

出　　处：《材料工程》2024年第9期27-33,共7页Journal of Materials Engineering

基　　金：国家科技重大专项(J2019-Ⅶ-0008-0148);浙江省重点研发计划(2021C05002);浙江省领军型创新创业团队项目(2020R01007);国家自然科学基金(52102202)。

摘　　要：Pt/PtRh为高温薄膜热电偶敏感材料,Al_(2)O_(3)和SiO_(2)为复合绝缘层材料,采用磁控溅射法成功制备Pt/PtRh薄膜热电偶及Al_(2)O_(3)/SiO_(2)复合型上下绝缘层,并通过掩膜-沉积法实现薄膜热电偶图案化制备。结果表明:制备的复合绝缘层Al_(2)O_(3)/SiO_(2)能够有效保证高温薄膜热电偶传感器在1200℃高温下的绝缘性和化学稳定性。Pt/PtRh热电偶阵列精度达到200μm,可在1200℃下稳定工作超过2200 min,经过4000 min升降温循环测试后,热电偶输出热电动势偏差小于1%。热电偶传感器整体厚度小于20μm,集成于合金与热障涂层之间的热电偶在高温服役环境下可稳定工作并测量合金表面温度。多层结构的样件在服役测试中无分层、脱落现象,热电偶稳定输出信号。The high-temperature thermocouple sensors were fabricated via magnetron sputtering,and the thermocouple patterns were prepared by using mask deposition,the sensing materials of thermocouples were Pt and PtRh,and the insulating layers were Al_(2)O_(3) and SiO_(2).The results show that insulating layers Al_(2)O_(3)/SiO_(2) are able to ensure the electrical insulation and stability of the sensors at 1200℃.The precision of Pt/PtRh thermocouples reaches 200μm,and the thermocouples can work under 1200℃for 2200 min.After a 4000 min-cycling tests,the output voltage deviation is less than 1%.The thickness of whole thermocouple sensor is less than 20μm,and can be integrated between the alloy and the thermal barrier to measure the temperature of the alloy surface.The multilayered structure exhibits stable signal output without delamination and separation during the service test.

关 键 词：高温薄膜热电偶 铂-铂铑热电偶 塞贝克效应 氧化铝绝缘层 氧化硅绝缘层 

分 类 号：TN44[电子电信—微电子学与固体电子学]