表面改性多孔氧化硅减反射膜的制备及其性能分析  

Preparation and Performance Study of Surface Modified Porous Silica Anti-reflective Coating

作　　者：王逸翔 肖志葳 贾红宝[1] 张子潮 朱世海 Wang Yixiang;Xiao Zhiwei;Jia Hongbao;Zhang Zichao;Zhu Shihai(School of Science,University of Science and Technology Liaoning,Anshan Liaoning 114051,China)

机构地区：[1]辽宁科技大学理学院,辽宁鞍山114051

出　　处：《山西化工》2024年第9期11-13,共3页Shanxi Chemical Industry

基　　金：辽宁省教育厅基本科研项目-面上项目(LJKMZ20220641和JYTMS20230949)。

摘　　要：采用溶胶-凝胶法,以正硅酸乙酯为前驱体,盐酸为催化剂,三嵌段共聚物F127为模板剂成功制备SiO_(2)溶胶。采用提拉法在石英基底上镀制SiO_(2)光学减反膜,通过后嫁接1H,1H,2H,2H-全氟癸基三乙氧基硅烷对薄膜表面进行改性,提高薄膜的环境稳定性。采用紫外-可见-近红外光谱仪、接触角测量仪及环境稳定性实验分析薄膜的光学性能和耐用性。结果表明,经改性后的薄膜在中心波长1600 nm的透射率达到99.3%,薄膜的水接触角达93°,在80%相对湿度和40℃的环境下放置7 d后透射率仅下降0.5%,接触角仅下降1.75°,说明薄膜有良好的环境稳定性。SiO_(2)sol has been successfully synthesized using tetraethyl orthosilicate as a precursor and triblock copolymer surfactant F127 as template with hydrochloric acid as the catalyst.The SiO_(2)coating was deposited on quartz substrates using the dip-coating method,and film surface modification was carried out by grafting 1H,1H,2H,2H-perfluorodecyltriethoxysilane to improve the environmental stability of the film.The optical properties and durability of the film were investigated using UV-Vis-NIR spectrometer,contact angle tests,and environmental stability experiments.The results show that the transmittance of the modified film at the central wavelength of 1600 nm reaches 99.3%,and the water contact angle of the film is 93°.After being placed in an environment of 80%relative humidity and 40°for 7 days,the transmittance only decreased by 0.5%and the contact angle only decreased by 1.75°,indicating that the film has good environmental stability.

关 键 词：溶胶-凝胶法 表面改性 多孔氧化硅 减反射膜 环境稳定性 

分 类 号：O484.5[理学—固体物理]