扫描探针显微镜旋转样品台的开发及应用  

Development and Application of Rotating Sample Stage Based on Scanning Probe Microscope

作　　者：蒯伟杰 田罡 王杰[2] KUAI Weijie;TIAN Gang;WANG Jie(National Demonstration Center for Experimental Physics Education,School of Physics,Shandong University,Jinan 250100,China;Precision Acousto-Optic Instruments Institute,School of Instrumentation Science and Engineering,Harbin Institute of Technology,Harbin 150080,China)

机构地区：[1]山东大学物理学院物理国家级实验教学示范中心,济南250100 [2]哈尔滨工业大学仪器科学与工程学院精密声光仪器研究所,哈尔滨150080

出　　处：《实验室研究与探索》2024年第9期33-36,共4页Research and Exploration In Laboratory

基　　金：山东大学2022年实验室建设与管理研究重点项目(SY20222202)。

摘　　要：使用扫描探针显微镜对各向异性材料进行面内方向表征测试时,需进行样品的原位旋转,但目前并没有成熟的解决方案。因此,基于扫描探针显微镜研发了一种多层结构的原位旋转样品台及定位方法。配合定位片完成1次定轴心操作后,更换新样品或改变同一样品测试位置,均无须再进行繁琐定位和调整,大幅度提高了测试效率。由于引入了定位片,定轴心操作无需对样品进行标记或专门寻找具有明显特征的特殊观测点作为参照,增强了样品的普适性。此外,使用该旋转台对PbTiO_(3)薄膜的面内、面外压电响应进行表征,并重构了其三维铁电畴,使电畴信息分析更为直观。When using scanning probe microscopy to characterize the in-plane orientation of anisotropic materials,insitu rotation of the sample is required,but currently there is no mature solution.Therefore,a multi-layer structure insitu rotating sample stage and positioning method are developed based on scanning probe microscopy.After completing once axis centering operation with the positioning plate,the sample stage eliminates the need for tedious positioning and adjustment,whether it is replacing a new sample or changing the testing position on the same sample,which greatly improves testing efficiency.In addition,due to the introduction of positioning plates,there is no need to mark the sample or deliberately search for special observation points with obvious characteristics of the sample as a reference during the axial centering operation,which enhances the universality of the sample.Finally,the in-plane and out of plane piezoelectric responses of PbTiO_(3)thin films are characterized using the rotating sample table,and their three-dimensional ferroelectric domains are reconstructed to provide a more intuitive analysis of domain information.

关 键 词：扫描探针显微镜 旋转台 铁电畴 三维重构 

分 类 号：O766.1[理学—晶体学]