基于GO/Mxene复合材料的柔性LC无线湿度传感器研究  

Research on flexible LC wireless humidity sensor based on GO/Mxene

作　　者：张小勇[1] 寇海荣 尚珍珍 杨立波[1] 王勇博 Zhang Xiaoyong;Kou Hairong;Shang Zhenzhen;Yang Libo;Wang Yongbo(Department of Intelligence and Automation,Taiyuan University,Taiyuan 030032,China)

机构地区：[1]太原学院智能与自动化系,太原030032

出　　处：《电子测量与仪器学报》2024年第6期154-160,共7页Journal of Electronic Measurement and Instrumentation

基　　金：山西省基础研究计划(202103021223005,202203021212015);山西省高等学校科技创新项目(2022L575)资助。

摘　　要：针对当前湿度传感器在检测范围、灵敏度等方面的不足及实际应用中对无源感知、可弯折能力等的需求,本文对基于GO/Mxene复合材料的柔性LC无线湿度传感器进行了研究。对传感器原理进行分析,设计了一个以聚酰亚胺为基底的柔性叉指电极天线,该天线谐振频率为146 MHz,并利用仿真软件得到了天线上的电场分布。制备了GO/Mxene复合材料,使用扫描电子显微镜和能谱分析仪对GO/MXene复合材料的表面形貌和微观结构等进行了表征,验证了复合材料的结构与组成元素。将所制备的复合材料作为湿度敏感材料置于天线上场强最强处完成了湿度传感器的制作。对传感器性能进行了测试,测试表明该传感器具有较高的灵敏度,在20~70%RH的相对湿度范围内,传感器的灵敏度达到了90.51 kHz/%RH,在70~95%RH的相对湿度范围内,灵敏度达到了651.86 kHz/%RH。同时该传感器的稳定性和响应时间性能良好,可实现人体呼吸监测,在健康检测、机器人皮肤等领域具有一定的应用前景。A flexible LC wireless humidity sensor based on GO/Mxene is investigated.Its purpose is to compensate for the limitations of a single material and meet the requirements for passive sensing and bending performance in applications.The principle of the sensor is analysed,and a flexible cross finger electrode antenna based on polyimide is designed.The resonant frequency of the antenna is 146 MHz,and the electric field distribution on the antenna is obtained using simulation software.GO/MXene is prepared.The surface morphology and microstructure of GO/MXene are characterized using scanning electron microscopy and energy spectrum analyze,and its structure and constituent elements of GO/MXene are verified.The humidity sensor is fabricated by placing the prepared GO/MXene as a humidity sensitive material at the strongest field strength of the antenna.The performance of the sensor is tested.The results showed that the sensor has high sensitivity.In the relative humidity(RH)range of 20~70%RH,the sensitivity of the sensor reached 90.51 kHz/%RH,and in the relative humidity range of 70~95%RH,the sensitivity reached 651.86 kHz/%RH.At the same time,the sensor has good stability and response time performance,which can monitor human respiration.The Sensor has considerable application prospects in fields such as health detection and robot skin.

关 键 词：湿度 无线 呼吸监测 氧化石墨烯 

分 类 号：TH89[机械工程—仪器科学与技术]