Optical facet coatings for high-performance LWIR quantum cascade lasers atλ∼8.5μm  

8.5μm高性能长波红外量子级联激光器的光学腔面镀膜研究

作　　者：MA Yuan LIN Yu-Zhe WAN Chen-Yang WANG Zi-Xian ZHOU Xu-Yan ZHANG Jin-Chuan LIU Feng-Qi ZHENG Wan-Hua 马源;林羽喆;万晨杨;王紫纤;周旭彦;张锦川;刘峰奇;郑婉华(中国科学院半导体研究所固态光电信息技术重点实验室,北京100083;中国科学院大学材料科学与光电工程中心,北京100049;潍坊先进光电芯片研究院,山东潍坊261021)

机构地区：[1]Laboratory of Solid-State Optoelectronics Information Technology,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China [2]Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China [3]Weifang Academy of Advanced Opto-Electronic Circuits,Weifang 261021,China

出　　处：《红外与毫米波学报》2024年第4期497-502,共6页Journal of Infrared and Millimeter Waves

基　　金：Supported by the National Natural Science Foundation of China(12393830)。

摘　　要：We report on the performance improvement of long-wave infrared quantum cascade lasers(LWIR QCLs)by studying and optimizing the anti-reflection(AR)optical facet coating.Compared to the Al2O3 AR coat⁃ing,the Y_(2)O_(3)AR coating exhibits higher catastrophic optical mirror damage(COMD)level,and the optical facet coatings of both material systems have no beam steering effect.A 3-mm-long,9.5-μm-wide buried-heterostruc⁃ture(BH)LWIR QCL ofλ~8.5μm with Y_(2)O_(3)metallic high-reflection(HR)and AR of~0.2%reflectivity coating demonstrates a maximum pulsed peak power of 2.19 W at 298 K,which is 149%higher than that of the uncoated device.For continuous-wave(CW)operation,by optimizing the reflectivity of the Y_(2)O_(3)AR coating,the maximum output power reaches 0.73 W,which is 91%higher than that of the uncoated device.通过研究和优化长波红外量子级联激光器(LWIR QCLs)的光学腔面增透(AR)膜,可提高器件的输出性能。与Al_2O_3膜系相比,Y_(2)O_(3)AR膜表现出更高的腔面光学灾变(COMD)水平,两种膜系的光学腔面镀膜均无光束转向效应。对激射波长为8.5μm的3 mm腔长、9.5μm脊宽掩埋异质结(BH)LWIR QCL使用Y_(2)O_(3)膜系的金属高反(HR)膜和反射率约0.2%的AR膜,在298 K下获得了2.19 W的最高脉冲峰值功率,较未镀膜器件提高149%。对于连续波(CW)操作,通过优化Y_(2)O_(3)AR膜的反射率,最高输出功率达到0.73 W,较未镀膜器件提高91%。

关 键 词：quantum cascade lasers long-wave infrared optical facet coatings catastrophic optical mirror damage 

分 类 号：O43[机械工程—光学工程] TN248.4[理学—光学]