Lithography Literacy  

作　　者：Lan Xinzhen 

机构地区：[1]不详

出　　处：《Beijing Review》2024年第40期20-20,共1页北京周报（英文版）

摘　　要：The guidance catalog for major technical equipment issued by the Ministry of Industry and Information Technology on September 9 has attracted widespread attention.Among the listed items is a deep ultraviolet(DUV)lithography machine,which operates at a wavelength of 193 nanometers(nm),with a resolution below 65 nm and an overlay accuracy under 8 nm.Its inclusion in the catalog,which aims to promote the use of listed equipment,signifies that China has made breakthroughs in high-end chip manufacturing.

关 键 词：LISTED BREAKTHROUGH ULTRAVIOLET 

分 类 号：TU993[建筑科学—市政工程] X705[环境科学与工程—环境工程]