基于胶膜转印的气动微阀及微流控芯片  

Pneumatic Microvalve and Microfluidic Chip Based on Film Transfer Printing

作　　者：徐校杰 田浩为 邱晔 吴梦希 刘军山[1,2] Xu Xiaojie;Tian Haowei;Qiu Ye;Wu Mengxi;Liu Junshan(State Key Laboratory of High-Performance Precision Manufacturing,School of Mechanical Engineering,Dalian University of Technology,Dalian 116024,China;Key Laboratory for Micro/Nano Technology and System of Liaoning Province,School of Mechanical Engineering,Dalian University of Technology,Dalian 116024,China)

机构地区：[1]大连理工大学机械工程学院高性能精密制造全国重点实验室,辽宁大连116024 [2]大连理工大学机械工程学院,辽宁省微纳米技术及系统重点实验室,辽宁大连116024

出　　处：《微纳电子技术》2024年第10期100-107,共8页Micronanoelectronic Technology

基　　金：国家重点研发计划青年科学家项目(2022YFB3204600);大连理工大学医工交叉联合基金(DUT23YG215);大连理工大学科技领军人才团队项目(DUT22LAB504)。

摘　　要：微阀是微流控芯片的重要部件,然而现有的微阀存在加工复杂、不利于批量生产等缺点,限制了微流控芯片的应用范围。研发了基于胶膜转印的胶粘键合方法,采用聚甲基丙烯酸甲酯(PMMA)微流道和聚二甲硅氧烷(PDMS)柔性薄膜制备了带有气动微阀的微流控芯片。通过调节转印参数,在PDMS薄膜上可控地制备了厚度约为1μm胶膜,随后利用微米级的胶膜实现了PDMS薄膜与PMMA微流道层的胶粘键合,既避免了微流道的堵塞,又保证了微流道结构的精确性。设计并制备了由上层气体流道、中间柔性薄膜和下层液体流道构成的气动微阀,由上层气体流道内输入气压驱动PDMS薄膜向下层的液体流道变形以实现流体控制功能。构建了静力学模型分析微阀的关闭特性,根据薄膜变形的仿真结果优化微阀结构,确保微阀的有效截止。经测试,微阀具有优异的开关特性,关闭的响应时间为550ms,开启的响应时间为200ms。表征了不同气体和液体压强下的体积流量变化规律,验证了气动微阀可以实现对流体体积流量的精准调控。通过研发胶膜转印工艺实现了PMMA和PDMS的高效无损键合,开发了适合大规模制造的气动微阀,为微流控芯片进一步的实际应用开辟了新的途径。Microvalve is an important component of microfluidic chip,however,the existing microvalves have the disadvantages of complicated processing and not suitable for mass production,which limits the application scope of microfluidic chip.An adhesive bonding method based on adhesive film transfer was developed,microfluidic chips with pneumatic microvalve were prepared with polymethylmethacrylate(PMMA)plate and polydimethylsiloxane(PDMS)flexible film.By controlling the parameters of the transfer printing,an adhesive film with a thickness of about 1μm was controllably laminated onto the PDMS film to realize adhesive bonding to PMMA.Subsequently,the adhesive bonding of the PDMS film to the PMMA microfluidic layer was achieved using micron scale adhesive film,avoiding blockage of the microfluidic channel and ensuring the accuracy of the microfluidic structure.A pneumatic microvalve composed of upper gas channel,middle flexible film and lower liquid channel was designed and prepared.The input pressure in the upper gas channel drives the deformation of the PDMS film to the lower liquid channel to realize the fluid control function.A hydrostatic model was constructed to analyze the open and closing characteristics of the microvalve,and the microvalve structure was optimized according to the film deformation simulation results to ensure the effective shut-off of the microvalve.The test shows that the microvalve has excellent switching performance with a response time of 550 ms for closing and 200 ms for opening.Furthermore,the volume flows under different gas and liquid pressures were characterized,verifying that the pneumatic microvalve can realize the precise regulation of fluid volume flow.The efficient and lossless bonding of PMMA and PDMS was realized by developing the adhesive film transfer printing process,and the pneumatic microvalve suitable for large-scale manufacturing was developed,which opens up a new way for the further practical application of microfluidic chips.

关 键 词：气动微阀 微流控芯片 聚甲基丙烯酸甲酯(PMMA) 胶粘键合 转印 

分 类 号：TP67[自动化与计算机技术—控制理论与控制工程] TN305[自动化与计算机技术—控制科学与工程]