PEDOT∶PSS/MXene复合电极基界面电容式应力传感器  

Interfacial Capacitive Stress Sensor Based on PEDOT∶PSS/MXene Composite Electrode

作　　者：李佰骏 时吉进 吴家威 何鑫[1] Li Baijun;Shi Jijin;Wu Jiawei;He Xin(School of Applied Physics and Materials,Wuyi University,Jiangmen 529020,China)

机构地区：[1]五邑大学应用物理与材料学院,广东江门529020

出　　处：《微纳电子技术》2024年第10期125-133,共9页Micronanoelectronic Technology

基　　金：广东省普通高校创新团队项目(2021KCXTD042)。

摘　　要：针对复杂的制备方法,以及传统电容式压力传感器容量和灵敏度较低导致难以抵御温度、湿度、弯曲等因素带来的干扰,采用层状MXene和聚(3,4-乙二氧基噻吩)∶聚苯乙烯磺酸盐(PEDOT∶PSS)制备具有褶皱结构的复合电极。通过与1-乙基-3-甲基咪唑双三氟甲磺酰亚胺盐(EMIM-TFSA)离子液体介电层的结合,构建了电容式应力传感器。导电材料PEDOT∶PSS与MXene质量比为1∶1时,分别在0~50 kPa和50~200 kPa压力效应区间内实现了高达603和91.66 kPa^(-1)的线性灵敏度,具有快速的响应时间(仅需33 ms)以及优异的循环稳定性(至少4000次)。此外,该传感器在人体脉搏监测方面展现出实时、准确的特点,为可穿戴设备领域提供了新的发展思路。In view of the complex preparation method and the low capacity and sensitivity of traditional capacitive pressure sensors,which is difficult to resist the interference caused by temperature,humidity,bending and other factors,the layered MXene and poly(3,4-ethyldioxyethiophene)∶polystyrene sulfonate(PEDOT∶PSS)were used to prepare composite electrodes with wrinkled structure.A capacitive stress sensor was constructed by combining with dielectric layer of 1-ethyl-3-methylimidazole ditrifluoromethanesulfonimide salt(EMIM-TFSA)ionic liquid.The sensor with the conductive material PEDOT∶PSS and MXene at a mass ratio of 1∶1 achieves linear sensitivities of up to 603 and 91.66 kPa^(-1),rapid response time(only 33 ms)and excellent cyclic stability(at least 4000 cycles)over pressure effect ranges of 0-50 kPa and 50-200 kPa,respectively.In addition,the sensor shows real-time and accurate characteristics in human pulse monitoring,which provides a new development idea for the field of wearable devices.

关 键 词：电容式应力传感器 复合电极 褶皱结构 人体脉搏监测 层状MXene 聚(3 4-乙二氧基噻吩)∶聚苯乙烯磺酸盐(PEDOT∶PSS) 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TB33[自动化与计算机技术—控制科学与工程]