基于宏观和微观分形几何的气敏传感器  

Gas Sensor Based on Macro and Micro Fractal Geometry

作　　者：蒋安炎 王瑞雪 王微 蒋茂刚 吴志远[3] 张文理 JIANG Anyan;WANG Ruixue;WANG Wei;JIANG Maogang;WU Zhiyuan;ZHANG Wenli(School of Electrical and Electronic Engineering,Chongqing University of Technology;Chongqing Qingshan Industrial Co.,Ltd;School of Microelectronics and Communication Engineering,Chongqing University;Zhengzhou University of Aeronautics)

机构地区：[1]重庆理工大学电气与电子工程学院 [2]重庆青山工业有限责任公司 [3]重庆大学微电子与通信工程学院 [4]郑州航空工业管理学院

出　　处：《仪表技术与传感器》2024年第9期5-12,共8页Instrument Technique and Sensor

基　　金：重庆市教委科学技术研究项目(KJQN202301120);国家自然科学基金青年项目(622051510)。

摘　　要：灵敏度和检测下限是气体传感器的关键性能指标。文中基于分形几何设计传感器宏微观结构提升灵敏度和检测下限指标。在宏观结构上,基于Koch雪花柱和Menger海绵设计传感器基底结构,利用分形基底增加有效接触面积以提高气敏性能。在微观结构上,引入分形维数表征薄膜的微观结构和性能,制备了不同含量Au/MWCNTs传感器在不同温湿度下以NO2为目标气体进行测试。分形分析和实验结果表明,分形维数可以表征薄膜的气敏性能,具有分形基底和40%Au/MWCNTs膜的传感器具有最高的分形维数和灵敏度,是传统结构(圆柱体)和MWCNTs膜的9倍以上。Sensitivity and lower detection limit are critical performance index of gas sensor.The utilization of fractal geometry in the design of both macro and micro structures of sensors were employed in this paper as a means of enhancing sensitivity and lower detection limit.In the macro structure,Koch snowflake cube and Menger sponge were used to design the structure of sensor substrate,the fractal substrate was used to increase the effective contact area to improve gas sensing performance.In the micro structure,fractal dimension was introduced to characterize the micro structure and properties of films.Au/MWCNT sensors with different Au content were prepared and tested with NO2 as the target gas at different temperatures and humidity.Fractal analysis and experimental results show that the gas sensing performance of film can be characterized by fractal dimension,and the sensors with fractal structure substrate and 40%Au/MWCNTs films have the highest fractal dimension and sensitivity,which is more than 9 times that of those with traditional structures(Cylinder)and MWCNTs films.

关 键 词：气体传感器 分形薄膜 灵敏度 检测下限 分形维数 分形几何 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]