ZAF定量碳元素时K因子测量的要点解析  

Analysis on key points for K factor measurement during quantification of carbon by ZAF

作　　者：张晓峰 胡晋生 李明 兰江林 周子浩 周广学 ZHANG Xiaofeng;HU Jinsheng;LI Ming;LAN Jianglin;ZHOU Zihao;ZHOU Guangxue(Central Iron and Steel Research Institute Co.,Ltd.,Beijing 100081,China;JEOLBEIJING Co.,Ltd.,Beijing 100089,China;Analytical Center,Ningbo Institute of Materials Technology and Engineering,Chinese Academy of Sciences,Ningbo 315201,China;NCS Testing Technology Co.,Ltd.,Beijing 100081,China;Key Laboratory of Marine Materials and Related Technologies,Ningbo Institute of Materials Technology and Engineering,Chinese Academy of Sciences,Ningbo 315201,China)

机构地区：[1]钢铁研究总院有限公司,北京100081 [2]捷欧路(北京)科贸有限公司,北京100089 [3]中国科学院宁波材料技术与工程研究所分析测试中心,浙江宁波315201 [4]钢研纳克检测技术股份有限公司,北京100081 [5]中国科学院宁波材料技术与工程研究所,中国科学院海洋新材料与应用技术重点实验室,浙江宁波315201

出　　处：《冶金分析》2024年第9期72-76,共5页Metallurgical Analysis

摘　　要：超轻元素的定量分析一直是电子探针应用领域的难点之一,本文以C元素为例,并以CrTiAlC磁控溅射材料为试样,根据ZAF定量的测量过程分析了准确测量超轻元素K因子的几个关键点,通过分析元素的定性谱图讲述正确扣除背景的方法,然后选择石墨和金刚石作为C元素的标准样品,对比分析定量结果阐明标样选择的重要性,另外讨论了当遇到重叠峰干扰时如何正确地使用脉冲高度分析器(PHA)进行谱峰过滤。The quantitative analysis of ultralight elements is always one of difficulties in the application field of electron probe microanalysis(EPMA).In this paper,carbon was selected as an example,and CrTiAlC magnetron sputtering material was used as a sample,then several key points for accurate measurement of K factor of ultralight element were analyzed according to the quantitative analysis process of ZAF.Proper methods for background deduction were discussed through the qualitative spectra of analytical element.Graphite and diamond were selected as certified reference materials of carbon.The quantitative analysis results were compared to discuss the importance of selection of certified reference materials.Moreover,how to properly use the pulse height analyzer(PHA)for peak filtering was also discussed in case of overlapping peak interference.

关 键 词：电子探针(EPMA) K因子 定性分析 背景扣除 标准样品 石墨 金刚石 脉冲高度分析器(PHA) 

分 类 号：TG115.215[金属学及工艺—物理冶金]