调制周期对CrN_(x)/TiAlSiN多层涂层抗冲蚀性的影响  

Effect of Modulation Periods on Erosion Performance of CrN_(x)/TiAlSiN Multilayer Coatings

作　　者：李花 李刘合[1] 李多铎 唐令 罗阳 韩明月 郑英晓 宋万万 LI Hua;LI Liuhe;LI Duoduo;TANG Ling;LUO Yang;HAN Mingyue;ZHENG Yingxiao;SONG Wanwan(School of Mechanical Engineering and Automation,Beihang University,Beijing 100191,China;Shenyang Aircraft Corporation,Shenyang 110034,China)

机构地区：[1]北京航空航天大学机械工程及自动化学院,北京100191 [2]沈阳飞机工业(集团)有限公司,沈阳110034

出　　处：《表面技术》2024年第19期82-92,140,共12页Surface Technology

基　　金：国家自然科学基金(NSFC 12275014,NSFC 12305278);中国博士后科学基金(2023M730180);中央高校基本科研业务费专项资金(YWF-23-Q-1019);国家资助博士后研究人员计划(GZB20230929)。

摘　　要：目的在砂粒环境下,改善TiAlSiN硬质涂层于高角度下的抗冲蚀性能。方法采用电弧离子镀复合高功率脉冲磁控溅射技术,制备不同调制周期下的CrN_(x)/TiAlSiN多层涂层。应用电子扫描电镜、X射线衍射仪、纳米压痕仪和划痕仪对涂层的显微结构、物相组成、纳米硬度、弹性模量以及结合力进行分析,于冲蚀试验平台对涂层抗冲蚀性能进行评价(Al_(3)O_(2)砂粒平均粒径为50μm,冲蚀速度为30 m/s,角度为90°)。结果涂层结构致密,由面心立方结构c-(Ti,Al)N、c-Cr、c-CrN和六方h-Cr_(2)N相构成。随着CrN_(x)子层结构的引入,TiAlSiN子层对应的(220)取向逐渐消失,(111)衍射晶面逐渐呈现。随着调制周期减少,CrN_(x)子层对应的h-Cr_(2)N(300)和c-CrN(220)衍射峰强度表现出先逐渐降低、后缓慢增加的规律。涂层结合变化幅度不大,处于68~71 N。虽然纳米硬度和弹性模量逐渐下降,分别从(37.5±0.46)GPa和(339.92±1.85)GPa下降至(31.2±0.40)GPa和(267.50±7.98)GPa,但H/E韧性指标逐渐增加,从0.110增加至0.116。在最小调制周期下,涂层表现出最优抗冲蚀性能,其冲蚀速率仅TiAlSiN硬质涂层的1/5。结论调制周期的减少增加了涂层界面数目,对扩展的裂纹起到了很好偏转作用,提升了涂层韧性,贡献了涂层抗冲蚀性能。在砂粒反复冲击作用下,于涂层中产生了交互作用的横纵裂纹,致使涂层以碎屑脆性剥落机制而失效,破坏特征表现为逐层剥落。Particle erosion is a seriously problem threatening the safety of high-speed rotating mechanical components in a dusty service environment.TiAlSiN coatings with high hardness and some extent toughness is a kind of promising erosion protective ceramic hard coatings.In this paper,CrN_(x) sublayers were introduced to explore its impacts on the erosion performance of TiAlSiN coatings at high angle sand erosion.On TC6 substrates,CrN_(x)/TiAlSiN multi-layer coatings with different modulation cycles(1,2,4,6,8,10)were prepared by combining arc ion plating and high-power pulsed magnetron sputtering.The sectional and surface morphology,phase composition,hardness,elastic modulus,toughness and adhesion strength between the deposited coating and the substrate were analyzed by scanning electron microscope(SEM),X-ray diffractometer(XRD),nano-indentation tester and scratch meter respectively.The erosion performance of the coating was evaluated on an erosion test platform,where the particle had an average size of 50μm,a speed of 30 m/s and feed rate 2 g/min,and impacted at an angle of 90° relative to the sample surface.The results showed that the structure of CrN_(x)/TiAlSiN multilayer coating were compact,composed of face-centered cubic structure c-(Ti,Al)N,c-Cr,c-CrN and hexagonal h-Cr_(2)N phases.Owning to the arc ion plating,the co-deposited droplets during the CrN_(x) introduction appeared on the surface of multilayer coatings.The(220)orientation from the TiAlSiN sublayer gradually disappeared,but the(111)diffraction plane gradually appeared.With the decrease of the modulation period,the number and size of the droplet defects on the coating surface slightly increased,and the diffraction peak intensity of h-Cr_(2)N(300) and c-CrN(220) decreased gradually before increasing in the CrNx sublayer.The adhesion strength between the coating and the substrate increased yet not significantly with the reduction in the modulation period,which was in the range of 68-71 N.The hardness and elastic modulus gradually decreased with the mod

关 键 词：电弧复合磁控 多层涂层 调制周期 抗冲蚀性能 损伤破坏 

分 类 号：TG174.4[金属学及工艺—金属表面处理]