基于白光干涉技术的表面微观形貌测量方法  

Surface Microtopography Measurement Based on White-light Interferometry

作　　者：李铭聪 刘盼 史建华 LI Mingcong;LIU Pan;SHI Jianhua

机构地区：[1]中国航空制造技术研究院

出　　处：《计量与测试技术》2024年第9期109-111,114,共4页Metrology & Measurement Technique

摘　　要：本文从测量原理和技术特性的角度出发,分析了扫描显微镜法、光学干涉法、激光散射法和共焦显微法等非接触测量方法的适用范围。同时,根据白光干涉法的干涉特性和工作原理,研究了其常用的信号处理算法、数据处理和参数评定过程,并对表面三维微观形貌、表面粗糙度、划痕深度进行测量与评价。实验证明:该方法在表面三维微观形貌精确测量中具有显著优势,且精度较高,可为其质量评定提供技术支撑。In this paper,the application range of non-contact measurement methods such as scanning microscopy,optical interferometry,laser scattering and confocal microscopy are analyzed from the point of view of measurement principle and technical characteristics.At the same time,according to the interference characteristics and working principle of white light interferometry,the signal processing algorithm,data processing and parameter evaluation process are studied,and the three-dimensional surface morphology,surface roughness and scratch depth are meas-ured and evaluated.Experimental results show that this method has significant advantages in the accurate measure-ment of three-dimensional surface microtopography,and the precision is high,which can provide technical support for its quality assessment.

关 键 词：白光干涉技术 非接触测量 表面三维微观形貌 数据处理 参数评定 

分 类 号：O436.1[机械工程—光学工程] TG806[理学—光学]