硫系异质集成光子器件(特邀)  

Heterogeneous Chalcogenide Integrated Photonic Devices(Invited)

作　　者：宋景翠 杨志强 尚海燕 万磊 李焱 吕超 李朝晖 Song Jingcui;Yang Zhiqiang;Shang Haiyan;Wan Lei;Li Yan;Lü Chao;Li Zhaohui(Guangdong Provincial Key Laboratory of Optoelectronic Information Processing Chips and Systems,School of Electronics and Information Technology,Sun Yat-sen University,Guangzhou 510275,Guangdong,China;State Key Laboratory of Optoelectronic Materials and Technologies,Sun Yat-sen University,Guangzhou 510275,Guangdong,China;School of Microelectronics Science and Technology,Sun Yat-sen University,Zhuhai 519000,Guangdong,China;School of Information Science and Engineering,Chongqing Jiaotong University,Chongqing 400074,China;School of Physics,Ningxia University,Yinchuan 750021,Ningxia,China;Southern Marine Science and Engineering Guangdong Laboratory(Zhuhai),Zhuhai 519000,Guangdong,China)

机构地区：[1]中山大学电子与信息工程学院广东省光电信息处理芯片与系统重点实验室,广东广州510275 [2]中山大学光电材料与技术国家重点实验室,广东广州510275 [3]中山大学微电子科学与技术学院,广东珠海519000 [4]重庆交通大学信息科学与工程学院,重庆400074 [5]宁夏大学物理学院,宁夏银川750021 [6]南方海洋科学与工程广东省实验室(珠海),广东珠海519000

出　　处：《光学学报》2024年第15期77-91,F0002,共16页Acta Optica Sinica

基　　金：国家重点研发计划(2020YFB1805800)。

摘　　要：光子集成电路以光子作为信息载体,成为解决现代信息社会通信容量瓶颈问题的关键技术,而高品质光学材料以及先进集成方式是该技术发展的重要基石。近年来,基于一种衬底实现多功能光子集成器件成为人们的研究热点,异质集成技术被认为是未来集成光子技术发展的必经之路。硫系玻璃材料具有光弹系数较大、传输损耗较低、透明波段宽等特点的同时可与多种材料实现集成,在光电集成信息处理领域展现出了巨大的优势。本文围绕硫系异质集成光子学在高效声光调制、片上非线性参量频率转换,以及稀土离子掺杂光放大三个领域中的应用进行了综述,最后阐述了硫系器件异质集成面临的挑战,并对未来的研究方向进行了展望。Significance The world is experiencing an unprecedented information explosion.The rapid development of high-performance computing(HPC),the Internet of Things(IoT),and artificial intelligence(AI)has introduced new demands for transmission bandwidth and information capacity.However,the bottleneck of integrated circuits is gradually emerging with the slowdown of Moore’s law.Compared with traditional integrated electric circuits,photonic circuits stand out due to their unique advantages such as low power consumption,high operating speed,and multi-lane processing capability.They are regarded as a key technology in the“post-Moore era.”Photonic integrated circuits(PICs),utilizing photons as the information carrier,have emerged as a crucial technology to overcome the communication capacity crunch in modern information society.High-quality optical materials and advanced integration strategies are essential cornerstones for photonic circuits.Silicon,as a dominant semiconductor material,is a popular photonic platform owing to its large refractive index and good compatibility with the CMOS processing procedure.However,silicon exhibits a relatively high propagation loss in the communication band and strong two-photon absorption(TPA)and free-carrier absorption(FCA)effects,hindering its further applications in large-scale integrated circuits and nonlinear photonics.In recent years,a variety of alternative materials have emerged,including silicon nitride,thin film lithium niobate(TFLN),aluminum nitride,silicon carbide,and chalcogenide glasses(ChGs).Key parameters of common photonic materials are summarized in Table 1.It can be seen that the refractive index of the ChGs can be flexibly tuned over a broad range.In addition,ChGs have been extensively used in optical signal processing due to their considerable photoelastic coefficients,low propagation loss,broad transparency window,and good compatibility with various material platforms.Achieving multifunctional PICs on a single chip has become a hotspot for researchers.However

关 键 词：集成光子学 硫系玻璃 异质集成 声光调制器 参量频率转换 波导放大器 

分 类 号：O436[机械工程—光学工程]