高速光电探测器的研究进展(特邀)  

Research Advances of High Speed Photodetectors(Invited)

作　　者：刘志鹏 刘智[1,2] 成步文 Liu Zhipeng;Liu Zhi;Cheng Buwen(Key Laboratory of Optoelectronic Materials and Devices,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;College of Materials Science and Opto-Electronic Technology,University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院半导体研究所光电子材料与器件重点实验室,北京100083 [2]中国科学院大学材料科学与光电技术学院,北京100049

出　　处：《光学学报》2024年第15期111-122,共12页Acta Optica Sinica

基　　金：国家重点研发计划(2022YFB2803100);国家自然科学基金(62250010,62090054,62274160);中国科学院战略性先导科技项目(XDB43020100);中国科学院青年创新促进会(2021111)。

摘　　要：随着通信数据传输量呈指数级增长,光互连技术取代传统的电互连技术,已成为中长距离低损耗高速传输的主流技术。光电探测器作为光接收端的核心器件,实际应用对其高速性能的要求越来越高。其中,波导耦合的光电探测器尺寸小、带宽大,且易与其他光电子器件进行片上集成,是高速光电探测的研究重点。传统高性能的InGaAs光电探测器和发展迅速的Ge/Si光电探测器各具特色,是最具代表性的近红外光通信波段光电探测器。主要介绍了这两类波导耦合光电探测器的研究进展,包括典型的器件结构和性能,以及优化带宽等性能的主要途径。Significance With the exponential growth in data transmission,optical interconnection technology has replaced traditional electrical interconnection technology and become the mainstream for low-loss and high-speed transmission over medium and long distances.By utilizing photons for data transfer,optical interconnections offer significant advantages such as large bandwidth and low latency,which are crucial in meeting the demands of modern communication systems.The photodetector,which converts optical signals into electrical signals,is the core component of optical interconnection systems.Rapid advancements in telecommunications and data processing necessitate photodetectors with exceptional speed and efficiency.Among photodetectors,waveguide-coupled designs have garnered significant attention due to their compact size,high bandwidth,and easy integration with other optoelectronic devices.These attributes are critical for the development of integrated photonic circuits,which are essential for applications in data centers,telecommunications,and emerging fields such as quantum computing.Traditional high-performance InGaAs photodetectors have long been the standard in near-infrared communications.Meanwhile,Ge/Si photodetectors are rapidly advancing due to silicon photonics,which enables large-scale,low-cost production compatible with existing semiconductor manufacturing processes.The need for higher data rates and lower power consumption drives the transition from electrical to optical interconnections in communication networks.Photodetectors are crucial in this transition because they directly impact the overall performance of optical communication systems.The integration of photodetectors with waveguides not only enhances the bandwidth but also allows for the development of more compact and efficient photonic devices.This integration is essential for the continued advancement of optical interconnection technologies,expected to play a dominant role in future communication infrastructures.Progress We first introduce th

关 键 词：光电探测器 波导耦合 铟镓砷 硅基锗 

分 类 号：O436[机械工程—光学工程]