基于热-光调谐的多通道干涉大范围可调谐激光器(特邀)  

Thermo-Optically Tuned Multi-Channel Interference Wide-Range Tunable Laser(Invited)

作　　者：陈子枫 王治达 娄家俊 陈泉安 蒋春 夏娟 陆巧银 国伟华 Chen Zifeng;Wang Zhida;Lou Jiajun;Chen Quanan;Jiang Chun;Xia Juan;Lu Qiaoyin;Guo Weihua(Wuhan National Laboratory for Optoelectronics,Huazhong University of Science and Technology,Wuhan 430074,Hubei,China;Ori-Chip Optoelectronics Technology Co.Ltd.,Ningbo 315191,Zhejiang,China)

机构地区：[1]华中科技大学武汉光电国家研究中心,湖北武汉430074 [2]宁波元芯光电子科技有限公司,浙江宁波315191

出　　处：《光学学报》2024年第15期181-190,共10页Acta Optica Sinica

基　　金：国家重点研究发展计划(2022YFB2802901);国家自然科学基金(62274073,62105112);湖北省重点研究发展计划(2021BAA001);国家博士后科学基金(2021M700048)。

摘　　要：提出一种新型的单片集成大范围可调谐半导体激光器——多通道干涉(MCI)激光器。基于热-光效应和8臂干涉增强调节反射峰与纵模,以类分布式布拉格反射(DBR)方式实现波长调谐;无需光栅结构,具有工艺简单、容差大的优点;采用偏置量子阱技术进行有源无源集成,降低二次外延难度。MCI激光器波长调谐范围大于48 nm,边模抑制比(SMSR)大于46 dB,洛伦兹线宽小于150 kHz,总热调谐功耗低于50 mW。将MCI激光器芯片、热电制冷器(TEC)和波长锁定器进行光发射组件(TOSA)封装,并进一步实现了集成调谐激光组件(Nano-ITLA)。组件尺寸仅为25.0 mm×15.6mm×6.5mm,光纤耦合输出功率大于16.5dBm,输出覆盖C++波段的120个频偏小于±0.5GHz的ITU(International telecommunication union)信道。在波长锁定与功率均衡控制下,波长抖动小于±1 pm,功率抖动小于±0.1 dB,反偏的半导体光放大(SOA)区消光比大于40 dB。MCI激光器在相干光通信中展示出卓越的应用潜力。Objective A tunable laser is one of the crucial technologies in optical networks due to its advantage of flexibly switching output wavelengths.After years of research,tunable semiconductor lasers have developed various solutions.Super-structure grating distributed Bragg reflector(SSGDBR)tunable lasers,modulated grating Y-branch distributed Bragg reflector(MGY-DBR)lasers,and chirped sample grating distributed reflector(CSGDR)tunable lasers can achieve wide-range tuning.External cavity lasers(ECL),distributed feedback(DFB)lasers,and vertical cavity surface emitting lasers(VCSELs)are typical structures used for tunable lasers.The cavity length of ECL can be very long,resulting in a very narrow linewidth.However,its large volume makes it difficult to integrate with other devices on a single chip.The tuning range of a single DFB laser is only 3-5 nm,which cannot meet the requirements for wide-range tuning.To achieve wide-range tuning,multiple DFB lasers with different center wavelengths can be integrated into a DFB array.Although the manufacturing process of DFB lasers is mature,ensuring the integration of multiple lasers on the same chip remains challenging.VCSELs have a short cavity length and high reflectivity,resulting in a large longitudinal mode spacing and good single longitudinal mode performance.However,they exhibit multiple transverse modes and a larger linewidth,which makes integration with other devices challenging.To address the limitations of the aforementioned lasers,we design and propose a monolithic integrated tunable laser-multi-channel interference(MCI)laser.This laser achieves wavelength tuning based on the thermal optical effect by selecting modes through arm interference of different lengths.Unlike the lasers mentioned earlier,the MCI laser does not require a grating for mode selection.Additionally,each arm can independently change the phase and control the laser wavelength,significantly simplifying the laser production process and increasing production tolerance.Through multiple rounds of design

关 键 词：集成光学 半导体激光器 可调谐激光器 微处理器 温度控制 波长锁定 

分 类 号：TN248[电子电信—物理电子学]