集成非互易光学器件(特邀)  

Integrated Nonreciprocal Photonic Devices(Invited)

作　　者：张子健 严巍[1,2] 秦俊 毕磊 Zhang Zijian;Yan Wei;Qin Jun;Bi Lei(National Engineering Research Center of Electromagnetic Radiation Control Materials,Chengdu 611731,Sichuan,China;Key Laboratory of Multi-Spectral Absorbing Materials and Structures of Ministry of Education,Chengdu 611731,Sichuan,China)

机构地区：[1]国家电磁辐射控制材料工程技术研究中心,四川成都611731 [2]多频谱吸波材料与结构教育部重点实验室(B类),四川成都611731

出　　处：《光学学报》2024年第15期341-358,共18页Acta Optica Sinica

摘　　要：光隔离器、光环行器等非互易光学器件广泛应用于信息光子系统,在光纤通信、光纤传感等技术中发挥了不可替代的作用。面向集成光学系统,研制平面化、可集成的非互易光学器件是该领域的关键难题之一,被称为“缺失的一环”。介绍了在集成光波导器件中实现光学非互易性的主要原理,总结了近年来基于磁光效应、非线性光学效应和时空调制机理研制集成非互易光学器件的部分代表性工作。最后分析了该领域面临的挑战,并对未来发展趋势进行了展望。Significance Nonreciprocal photonic devices including optical isolators and circulators,are widely used in information photonic systems and are indispensable in fiber optical communication and fiber optical sensing systems.Commercial nonreciprocal photonic devices rely on magneto-optical effects such as the Faraday rotation effect.In these devices,rare earth garnet single crystals grown by liquid phase epitaxy(LPE)are used to introduce nonreciprocal polarization to incident light.In combination with polarizers or waveplates,these devices provide optical isolation or circulation functionalities in free-space or fiber in-line structures.The development of photonic integrated circuits(PICs)allows for the parallel integration of photonic devices using semiconductor fabrication technologies.In PICs,reflection or scattering from the interfaces of different devices leads to an urgent demand for integrated nonreciprocal photonic devices.However,significant challenges have been encountered.Firstly,the magnetic material,rare-earth iron garnet(RIG),used in bulk nonreciprocal photonic devices,is lattice and thermal mismatched with PICs,making it very difficult to grow high-quality epitaxial films on semiconductor substrates.Secondly,the fabrication technology,LPE,is not compatible with the semiconductor fabrication process,which predominately uses vapor phase deposition.In addition,the presence of Fe elements prevents front-end-of-line(FEOL)integration of such materials,necessitating the development of a back-end-of-line(BEOL)compatible process.Thirdly,the Faraday rotation device structure faces significant issues due to waveguide structure-induced birefringence,leading to incomplete mode conversion between TE and TM modes due to different propagation constants.These problems pose significant challenges to the integration of nonreciprocal photonic devices on PICs.To date,nonreciprocal photonic devices are absent from all PIC technologies,including SiO_(2) waveguide-based photonic light circuits(PLCs),III-V material-based PIC

关 键 词：非互易光学 磁光效应 非线性光学 时空调制 硅基光电子 

分 类 号：O436[机械工程—光学工程]