面向激光雷达的硅基光学相控阵芯片及其探测方法的研究进展(特邀)  

Research Progress on Silicon-Based Optical Phased Array Chips and Detection Methods for LiDAR(Invited)

作　　者：胡鹤鸣 李杰 陈柏松 支自毫 李雪童 屈欢 王维鹏 陶敏 李盈祉 宋俊峰[1] Hu Heming;Li Jie;Chen Baisong;Zhi Zihao;Li Xuetong;Qu Huan;Wang Weipeng;Tao Min;Li Yingzhi;Song Junfeng(College of Electronic Science and Engineering,Jilin University,Changchun 130012,Jilin,China)

机构地区：[1]吉林大学电子科学与工程学院,吉林长春130012

出　　处：《光学学报》2024年第15期452-471,共20页Acta Optica Sinica

基　　金：国家自然科学基金(62090054,61934003,62105173,62105174);国家重点研发计划(2022YFB2804504);吉林省重大科技计划(20210301014GX);吉林省发展和改革委员会项目(2020C056);吉林大学科技创新研究团队计划(JLUSTIRT,2021TD-39)。

摘　　要：介绍了光学相控阵的工作原理,就硅基光学相控阵芯片的研究进展进行回顾,对芯片的性能参数进行对比分析,并对基于光学相控阵的各类全固态激光雷达系统的发展现状进行介绍。最后指出了光学相控阵技术的瓶颈,并对硅基光学相控阵芯片未来的发展研究趋势进行了思考和展望。Significance Through emitting light signals and detecting the echo signal of the target,LiDAR can obtain the position,velocity,and other characteristic quantities of the target.Compared with traditional millimeter wave radar,LiDAR features a shorter working wavelength,leading to higher resolution,longer detection distance,and stronger anti-interference capacity.With the above advantages,LiDAR has developed over the past decade,receiving widespread attention in many fields such as autonomous driving,remote sensing measurement,and space communication.At present,commercial LiDAR is mainly mechanical,which achieves two-dimensional beam turning by controlling mechanical rotating components(such as reflectors and prisms)to obtain environmental perception in a large field of view.However,mechanical rotation limits the scanning speed and reduces the reliability of the device.Due to its large size and low accuracy,its detection performance is severely affected by rotational inertia and service life.As an alternative to mechanical LiDAR,all-solid-state LiDAR has received widespread attention in recent years.All-solid state LiDAR mainly consists of micro-electromechanical(MEMS)type,Flash type,and optical phased array(OPA)type.MEMS LiDAR achieves electric field driving of laser position by integrating millimeter-level reflector structures and changes the tilt angle of the reflector by applying different voltages to achieve beam scanning control.However,due to the tiny movable units inside MEMS LiDAR,it cannot be considered an authentic all-solid-state LiDAR.Flash-type LiDAR can emit a large area of laser signals forward in a short period of time.However,as the emitted laser power is fixed,when the detection area increases,the power per unit area will decrease,significantly narrowing the detection distance and lowering the accuracy.Compared to traditional mechanical LiDAR,the optical phased array has become the research and development hot spot of all-solid-state LiDAR thanks to its high reliability,arbitrary directionality,a

关 键 词：光学相控阵 硅基光电集成 波导光栅天线 全固态激光雷达 

分 类 号：TN256[电子电信—物理电子学]