Single-fundamental-mode cryogenic(3.6 K)850-nm oxideconfined VCSEL  

作　　者：Anjin Liu Chenxi Hao Jingyu Huo Hailong Han Minglu Wang Bao Tang Lingyun Li Lixing You Wanhua Zheng 

机构地区：[1]Key Laboratory of Optoelectronic Materials and Devices,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China [2]Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China [3]Shanghai Key Laboratory of Superconductor Integrated Circuit Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China [4]Accelink technologies co.,Ltd,Wuhan 430205,China [5]Key Laboratory of Solid-State Optoelectronics Information Technology,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China

出　　处：《Journal of Semiconductors》2024年第10期69-73,共5页半导体学报（英文版）

基　　金：supported by the National Natural Science Foundation of China(Nos.62275243,62075209,and 61675193);the Beijing Natural Science Foundation(No.Z200006).

摘　　要：Cryogenic oxide-confined vertical-cavity surface-emitting laser(VCSEL)has promising application in cryogenic optical interconnect for cryogenic computing.In this paper,we demonstrate a cryogenic 850-nm oxide-confined VCSEL at around 4 K.The cryogenic VCSEL with an optical oxide aperture of 6.5μm in diameter can operate in single fundamental mode with a side-mode suppression-ratio of 36 dB at 3.6 K,and the fiber-coupled output power reaches 1 mW at 5 mA.The small signal modulation measurements at 298 and 292 K show the fabricated VCSEL has the potential to achieve a high modulation bandwidth at cryogenic temperature.

关 键 词：VCSEL cryogenic temperature cryogenic computing optical interconnect 

分 类 号：TN248[电子电信—物理电子学]