一种用于IC测试的精密测量单元电路设计  

Precision measurement unit circuit design for IC testing

作　　者：夏进 刘士兴 李航 李帮金 梁华国 Xia Jin;Liu Shixing;Li Hang;Li Bangjin;Liang Huaguo(School of Microelectronics,Hefei University of Technology,Hefei 230009,China)

机构地区：[1]合肥工业大学微电子学院,合肥230009

出　　处：《电子测量技术》2024年第11期13-19,共7页Electronic Measurement Technology

基　　金：国家自然科学基金重大科研仪器研制项目(62027815)资助。

摘　　要：随着集成电路产业的快速发展,对集成电路测试要求越来越高,精密测量单元是集成电路直流参数测试的核心单元。本文设计了一种用于集成电路测试的PMU电路,该电路使用现场可编程门阵列控制DAC模块施加电压激励,激励信号经PI调节器和功率放大器后,通过电阻匹配网络施加到被测器件,ADC采集测试响应数据,实现加压测流、加流测压等参数测试功能。所设计的PMU电路具有测试范围宽、测量精度高的优点,施加/测量电压范围-10~+15 V、最大电流±1.838 A。对不同测试模式下的系统性能进行了校准并采用高精度电阻负载进行功能验证,实验结果表明,系统校准后的测试误差优于0.05%,能够满足通用集成电路直流参数测试的要求。With the rapid development of the integrated circuit industry,higher requirements are put forward for integrated circuit testing,and the Precision Measurement Unit is the core unit for integrated circuit DC parameter testing.A PMU circuit for integrated circuit testing is designed in this paper,which uses a Field-Programmable Gate Array to control the DAC module to apply voltage excitation.The excitation signal after the PI regulator and power amplification is applied to the Device Under Test through the resistor matching network,Then,the ADC module reads back the test response data to realize the parameter testing functions such as applying voltage to measure current and applying current to measure voltage.The designed PMU circuit has the advantages of wide test range and high measurement accuracy,with an applied or measured voltage range of-10 V to+15 V and a maximum current of±1.838 A.The system performance in different test modes was calibrated and functionally verified with high-precision resistive loads,and the experimental results show that the system calibrated test error is better than 0.05%,which is able to meet the requirements of DC parameter testing of general-purpose integrated circuits.

关 键 词：集成电路测试 直流参数测试 精密测量单元 现场可编程阵列 

分 类 号：TN98[电子电信—信息与通信工程]