Advancing large-scale thin-film PPLN nonlinear photonics with segmented tunable micro-heaters  

作　　者：XIAOTING LI HAOCHUAN LI ZHENZHENG WANG ZHAOXI CHEN FEI MA KE ZHANG WENZHAO SUN CHENG WANG 

机构地区：[1]Department of Electrical Engineering,City University of Hong Kong,Hong Kong,China [2]School of Physics,Sun Yat-sen University,Guangzhou 510275,China [3]City University of Hong Kong(Dongguan),Dongguan 523808,China [4]Center of Information and Communication Technology,City University of Hong Kong Shenzhen Research Institute,Shenzhen 518057,China [5]State Key Laboratory of Terahertz and Millimeter Waves,City University of Hong Kong,Hong Kong,China

出　　处：《Photonics Research》2024年第8期1703-1708,共6页光子学研究（英文版）

基　　金：Research Grants Council,University Grants Committee(CityU 11204820,N_CityU113/20);Croucher Foundation(9509005);University Grants Committee(PF18-17958);National Natural Science Foundation of China(62105374)。

摘　　要：Thin-film periodically poled lithium niobate(TF-PPLN)devices have recently gained prominence for efficient wavelength conversion processes in both classical and quantum applications.However,the patterning and poling of TF-PPLN devices today are mostly performed at chip scales,presenting a significant bottleneck for future largescale nonlinear photonic systems that require the integration of multiple nonlinear components with consistent performance and low cost.Here,we take a pivotal step towards this goal by developing a wafer-scale TF-PPLN nonlinear photonic platform,leveraging ultraviolet stepper lithography and an automated poling process.To address the inhomogeneous broadening of the quasi-phase matching(QPM)spectrum induced by film thickness variations across the wafer,we propose and demonstrate segmented thermal optic tuning modules that can precisely adjust and align the QPM peak wavelengths in each section.Using the segmented micro-heaters,we show the successful realignment of inhomogeneously broadened multi-peak QPM spectra with up to 57%enhancement of conversion efficiency.We achieve a high normalized conversion efficiency of 3802%W-1cm-2in a 6 mm long PPLN waveguide,recovering 84%of the theoretically predicted efficiency in this device.The advanced fabrication techniques and segmented tuning architectures presented herein pave the way for wafer-scale integration of complex functional nonlinear photonic circuits with applications in quantum information processing,precision sensing and metrology,and low-noise-figure optical signal amplification.

关 键 词：tuning TUNABLE WAVEGUIDE 

分 类 号：O437[机械工程—光学工程]