High-performance and wavelength-transplantable on-chip Fourier transform spectrometer using MEMS in-plane reconfiguration  

作　　者：HENG CHEN HUI ZHANG JING ZHOU CHEN MA QIAN HUANG HANXING WANG QINGHUA REN NAN WANG CHENGKUO LEE YIMING MA 

机构地区：[1]School of Microelectronics,Shanghai University,Shanghai 201800,China [2]Shanghai Collaborative Innovation Center of Intelligent Sensing Chip Technology,Shanghai University,Shanghai 201800,China [3]Department of Electrical and Electronic Engineering,The Hong Kong Polytechnic University,Hong Kong 999077,China [4]Department of Electrical and Computer Engineering,National University of Singapore,Singapore 117583,Singapore [5]Center for Intelligent Sensors and MEMS(CISM),National University of Singapore,Singapore 117608,Singapore

出　　处：《Photonics Research》2024年第8期1730-1740,共11页光子学研究（英文版）

基　　金：National Natural Science Foundation of China(62304129);The Hong Kong Polytechnic University(P0046236)。

摘　　要：On-chip spectrometers with high compactness and portability enable new applications in scientific research and industrial development.Fourier transform(FT)spectrometers have the potential to realize a high signal-to-noise ratio.Here we propose and demonstrate a generalized design for high-performance on-chip FT spectrometers.The spectrometer is based on the dynamic in-plane reconfiguration of a waveguide coupler enabled by an integrated comb-drive actuator array.The electrostatic actuation intrinsically features ultra-low power consumption.The coupling gap is crucial to the spectral resolution.The in-plane reconfiguration surmounts the lithography accuracy limitation of the coupling gap,boosting the resolution to 0.2 nm for dual spectral spikes over a large bandwidth of 100 nm(1.5–1.6μm)within a compact footprint of 75μm×1000μm.Meanwhile,the in-plane tuning range can be large enough for arbitrary wavelengths to ensure the effectiveness of spectrum reconstruction.As a result,the proposed spectrometer can be easily transplanted to other operation bands by simply scaling the structural parameters.As a proof-of-concept,a mid-infrared spectrometer is further demonstrated with a dual-spike reconstruction resolution of 1.5 nm and a bandwidth of 300 nm(4–4.3μm).

关 键 词：waveguide tuning lithography 

分 类 号：TH744.1[机械工程—光学工程]