光学元件微缺陷偏振检测的图像处理方法研究  

Image processing method for polarization detection ofmicrodefects in optical components

作　　者：陈晓辉 王鑫森 段亚凡 CHEN Xiaohui;WANG Xinsen;DUAN Yafan(Research Center for Photonics Technology,Quanzhou Normal University,Quanzhou 362000,China;Fujian Key Laboratory of Advanced Micro-nano Photonics Technology and Devices,Quanzhou,362000,China;Fujian Collaborative Innovation Center for Ultra-precision Optical Engineering andApplication,Quanzhou 362000,China)

机构地区：[1]泉州师范学院光子技术研究中心,福建泉州362000 [2]福建省先进微纳光子技术与器件重点实验室,福建泉州362000 [3]福建省超精密光学工程技术与应用协同创新中心,福建泉州362000

出　　处：《光学仪器》2024年第5期24-30,共7页Optical Instruments

基　　金：福建省科技重大专项(2019HZ0102);泉州市科技计划项目(2021C003R)。

摘　　要：光学元件表面缺陷会严重影响到光学系统的性能指标。现有的光学元件表面缺陷检测技术存在检测速度慢,精度低等问题。基于光学元件微缺陷偏振检测技术,研究了缺陷偏振成像的数字图像处理方法。首先利用光的偏振特性采集到缺陷对比度高的图像,然后通过滤波去噪、阈值分割、形态学处理的方法对图像进行预处理,再根据不同的缺陷类型选取不同的特征参数从而实现缺陷检测及分类,此外还精确测量了缺陷的尺寸。结果表明,此方法的缺陷总检出率为95.90%,单张图像检测时间少于50 ms。Surface defects of optical components seriously affect the performance of optical systems.The existing surface defects detection technology of optical components has problems such as slow detection speed and low accuracy.This paper studies the digital image processing method of polarization imaging of defects based on the polarization detection technology of microdefects of optical components.Firstly,we used the polarization property of light to capture the image with high contrast of defects,and then pre-processed the image by filtering and denoising,threshold segmentation,morphological processing.Next,different feature parameters are selected according to different types of defects so as to achieve defect detection and classification,meanwhile accurately measuring the size of defects.The results showed that the total defect detection rate of this method was 95.90%,and the detection time of a single image was less than 50 ms.

关 键 词：缺陷检测 数字图像 光学元件 偏振特性 

分 类 号：TN29[电子电信—物理电子学]