近场微波显微镜的应用  

Applications of near-field microwave microscopy

作　　者：王美迪 张海洋 周子晗 吴喆 WANG Meidi;ZHANG Haiyang;ZHOU Zihan;WU Zhe(School of Physics,University of Electronic Science and Technology of China,Chengdu 611731,China)

机构地区：[1]电子科技大学物理学院,四川成都611731

出　　处：《物理实验》2024年第10期1-12,共12页Physics Experimentation

基　　金：四川省科学技术厅项目(No.2020YJ0266);教育部高等学校大学物理课程教学指导委员会高等学校教学研究项目(No.DJZW202335xn);四川省高等教育人才培养质量和教学改革项目(No.JG2021-848);大学生创新创业训练项目(No.202210614261X)。

摘　　要：近场扫描微波显微镜因具有强大的穿透能力和无损检测优势,已成为微纳尺度下表征材料电磁特性的重要工具.本文首先介绍了近场扫描微波显微镜的结构原理、探头仿真优化以及图像倾斜修正方法.然后,阐述了近场扫描微波显微镜测量样品局域高频电导率和介电常量的方法.最后,重点探讨了近场扫描微波显微镜在材料和生物等领域的应用,详细分析了所获取的点扫描图、线扫描图和面扫描图.本文旨在帮助读者更深入地了解近场扫描微波显微镜的现状及其未来应用前景.Near-field scanning microwave microscopy(NSMM)has emerged as a crucial tool for characterizing electromagnetic properties at the micro and nanoscale for its strong penetration capability and non-destructive detection.This article firstly introduced structural principle of NSMM,probe simulation optimization,and methods for correcting image tilt.Then,the article elaborated on the measurement of local high-frequency electrical conductivity and permittivity of samples.Finally,the application of NSMM in the fields of materials and biology was discussed especially,and the obtained point scan,line scan and plane scan were analyzed in detail.This article aimed to enhance readers’understanding of the current status and future prospects of NSMM.

关 键 词：近场微波成像 微波显微镜 微波探针 无损检测 

分 类 号：TH742[机械工程—光学工程] TN16[机械工程—仪器科学与技术]