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作 者:Ruitao Jia Fangzhu Qing Shurong Wang Yuting Hou Changqing Shen Feng Hao Yang Yang Hongwei Zhu Xuesong Li
机构地区:[1]School of Integrated Circuit Science and Engineering(Exemplary School of Microelectronics),University of Electronic Science and Technology of China,Chengdu,610054,China [2]State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China,Chengdu,610054,China [3]Shenzhen Institute for Advanced Study,University of Electronic Science and Technology of China,Shenzhen,518110,China [4]School of Materials and Energy,University of Electronic Science and Technology of China,Chengdu,610054,China [5]PipeChina Southwest Pipeline Co.,Ltd.,Chengdu,610041,China [6]State Key Lab of New Ceramics and Fine Processing,School of Materials Science and Engineering,Tsinghua University,Beijing,100084,China
出 处:《Journal of Materiomics》2024年第1期1-6,共6页无机材料学学报(英文)
基 金:supported by National Natural Science Founda-tion of China(No.52172138);Shenzhen Science and Technology Program(No.(2021)105).
摘 要:Chemical vapor deposition(CVD)is the most promising method for the preparation of high-quality and large-area graphene films,especially the epitaxial growth of graphene on large-area single-crystal Cu foils.While single-crystal Cu foils are normally achieved by thermally annealing the commercial poly-crystalline Cu foils,their size and therefore the size of graphene films grown on them are limited to the size of the reaction chamber.We report a simple and feasible method to prepare large-area Cu foils with decimeter grains by thermally annealing the rolled-up Cu foils,where the Cu layers are separated by thin porous carbon fiber cloths.The carbon fiber cloths prevent Cu layers from sticking to each other at high temperatures while do not block the gas transportation.In such a way,the utilization efficiency of the reaction chamber is significantly improved,e.g.,0.2 m×(1e2)m Cu foils can be processed even in a 5 cm diameter quartz tube chamber.High-quality graphene films grown on such Cu foils are then demon-strated.This method may be suitable for the annealing of other metal foils to enlarge grain size and the synthesis of other two-dimensional materials on them such as h-BN.
关 键 词:GRAPHENE Single-crystal Cu Chemical vapor deposition Synthesis
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