Observing suppressed polarization in flexible ferroelectric negative capacitance field effect transistors  

作　　者：Chuanlai Ren Liyufen Dai Congbing Tan Guangtong Yuan Ke Qu Jinbin Wang Xiangli Zhong Mingqiang Huang Jiyan Dai Gaokuo Zhong Jiangyu Li 

机构地区：[1]Shenzhen Institutes of Advanced Technology,Chinese Academy of Sciences,Shenzhen,518055,Guangdong,China [2]Guangdong Provincial Key Laboratory of Functional Oxide Materials and Devices,Southern University of Science and Technology,Shenzhen,518055,Guangdong,China [3]School of Materials Science and Engineering,Xiangtan University,Xiangtan,411105,Hunan,China [4]School of Physics and Electronics,Hunan University of Science and Technology,Xiangtan,411201,Hunan,China [5]Department of Materials Science and Engineering,Southern University of Science and Technology,Shenzhen,518055,Guangdong,China [6]Department of Applied Physics,The Hong Kong Polytechnic University,Hong Kong,999077,China

出　　处：《Journal of Materiomics》2024年第4期762-769,共8页无机材料学学报（英文）

基　　金：We acknowledge the support of National Natural Science Foundation of China(12192213,52302142,92066203 and 92066102);Shenzhen Science and Technology Program(KQTD20170810160424889,RCYX20200714114733204,JCYJ20200109115219157 and JCYJ20200109115210307);Guangdong Provincial Key Laboratory Program(2021B1212040001);from the Department of Science and Technology of Guangdong Province,Guangdong Basic and Applied Basic Research Foundation(2021A1515110689);China Postdoctoral Science Foundation(2021M693281).

摘　　要：Negative capacitance(NC)has the potential to enable low power microelectronics beyond the fundamental thermionic limit,and it has been theorized that the thermodynamically unstable NC of ferroelectrics can be stabilized by linear dielectric,making negative capacitance ferroelectric field effect transistors(NC-FeFET)possible.Nevertheless,the validity of NC as a physical concept for ferroelectrics remain contentious despite numerous theoretical and experimental investigations,and the intrinsic ferroelectric NC with suppressed polarization has not been demonstrated except locally at vortex core.While NC-FeFET with subthreshold swing(SS)lower than 60 mV/dec limit has been reported,such device characteristics has not been directly connected to suppressed polarization at materials’level,and alternative mechanisms other than NC have also been proposed.Here we demonstrate stable sub-60 mV/dec SS with hysteresis free Isingle bondV in NC-FeFET based on SrTiO_(3)/Pb(Zr_(0.1)Ti_(0.9))O_(3)/SrTiO_(3) heterostructure,and observe its suppressed polarization at both macroscopic and microscopic scales.The intrinsic ferroelectric NC thus is experimentally confirmed and directly connected to NC-FeFET performance,and the mica-based device is also highly flexible and robust under cyclic bending as well as extended heating.

关 键 词：Negative capacitance field-effect transistors FERROELECTRIC Pulse laser deposition MICA 

分 类 号：TN32[电子电信—物理电子学]