用于VOCs气体探测的制冷型红外探测器  

Cooled Infrared Detector for VOCs Gas Detection

作　　者：段煜 毛剑宏 熊雄 胡明灯 DUAN Yu;MAO Jianhong;XIONG Xiong;HU Mingdeng(Zhejiang Juexin Microelectronics Co.Ltd.,Lishui 323000,China)

机构地区：[1]浙江珏芯微电子有限公司,浙江丽水323000

出　　处：《红外技术》2024年第10期1178-1185,共8页Infrared Technology

摘　　要：随着红外技术的发展,制冷红外探测器在气体探测领域发挥出重要作用。介绍了国内外关于制冷红外气体探测器的研究情况,并详细阐述了近期浙江珏芯微电子有限公司在挥发性有机物(volatile organic compounds,VOCs)气体探测器方向上的研究进展。通过窄带低温滤光片设计、杂散辐射抑制及探测器组件工艺等方面的关键技术研究,实现了制冷红外气体探测器的制备,在此基础上对探测器进行了系统性的性能评价与分析,展示了实际成像效果。With the development of infrared technology,cooled infrared detectors are playing an increasingly important role in gas detection.This paper introduces research on infrared gas detectors,domestically and abroad,and expounds on the recent research progress of Zhejiang Juexin Microelectronics Co.,Ltd.on VOC gas detectors.The detectors were manufactured using a narrow bandpass filter design,stray radiation suppression,and detector assembly process technology.Moreover,a systematic performance evaluation and analysis of the detector were performed,and the actual imaging was displayed.

关 键 词：制冷红外探测器 气体探测 挥发性有机物 

分 类 号：TN215[电子电信—物理电子学]