In-situ real-time monitoring of ultrafast laser processing using wide-field high-resolution snapshot compressive microscopy  

作　　者：Xiaodong Wang Miao Cao Ziyang Chen Jiao Geng Ting Luo Yufei Dou Xing Liu Liping Shi Xin Yuan 

机构地区：[1]Zhejiang University,Hangzhou 310027,China [2]School of Engineering,Westlake University,Hangzhou 310030,China [3]School of Physics,Harbin Institute of Technology,Harbin 150001,China [4]Hangzhou Institute of Technology,Xidian University,Hangzhou 311231,China [5]Westlake Institute for Optoelectronics,Fuyang,Hangzhou 311421,China [6]Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province,Westlake University,Hangzhou 310024,China

出　　处：《Light(Advanced Manufacturing)》2024年第3期52-61,共10页光（先进制造）（英文）

基　　金：supported by the National Natural Science Foundation of China(62271414);Science Fund for Distinguished Young Scholars of Zhejiang Province(LR23F010001);Research Center for Industries of the Future(RCIF)at Westlake University.and Key Project of the Westlake Institute for Optoelectronics(Grant No.2023GD007).

摘　　要：Over the last few decades,ultrafast laser processing has become a widely used tool for manufacturing microstructures and nanostructures.The real-time monitoring of laser material processing provides opportunities to inspect processes and provide feedback.To date,in-situ and real-time monitoring of laser material processing has rarely been performed.To this end,we propose dual-path snapshot compressive microscopy(DP-SCM)for high-speed,large field-of-view,and high-resolution imaging for in-situ and real-time ultrafast laser processing.In the evaluation of DP-SCM,the field of view,lateral resolution,and imaging speed were measured to be 2 mm,775 nm,and 500 fps,respectively.In ultrafast laser processing,the laser scanning process is observed using a DP-SCM system when translating the sample stage and scanning the focused femtosecond laser.Finally,we monitored the development of a self-organized nanograting structure to validate the potential of our system for unveiling new material mechanisms.The proposed method serves as an add-up(plug-and-play)module for any imaging setup and has vast potential for opening new avenues for high-throughput imaging in laser material processing.

关 键 词：Snapshot compressive imaging Femtosecond laser processing Laser-induced self-organization 

分 类 号：TH742[机械工程—光学工程]