Laser speckle grayscale lithography:a new tool for fabricating highly sensitive flexible capacitive pressure sensors  

作　　者：Yong Zhou Kun Wang Junkun Mao Yifei Ma Mei Wang Suotang Jia Xuyuan Chen Zhaomin Tong 

机构地区：[1]State Key Laboratory of Quantum Optics and Quantum Optics Devices,Institute of Laser Spectroscopy,Shanxi University,Taiyuan,030006,China [2]Collaborative Innovation Center of Extreme Optics,Shanxi University,Taiyuan,030006,China

出　　处：《Light(Advanced Manufacturing)》2024年第2期75-86,共12页光（先进制造）（英文）

基　　金：supported by the Key Research and Development Program of Shanxi Province(202102030201002);the Changjiang Scholars and Innovative Research Team at the University of Ministry of Education of China(IRT_17R70);the State Key Program of National Natural Science of China(11434007);the 111 Project(D18001);the Fund for Shanxi“1331 Project”Key Subjects Construction.

摘　　要：Achieving a high sensitivity for practical applications has always been one of the main developmental directions for wearable flexible pressure sensors.This paper introduces a laser speckle grayscale lithography system and a novel method for fabricating random conical array microstructures using grainy laser speckle patterns.Its feasibility is attributed to the autocorrelation function of the laser speckle intensity,which adheres to a first-order Bessel function of the first kind.Through objective speckle size and exposure dose manipulations,we developed a microstructured photoresist with various micromorphologies.These microstructures were used to form polydimethylsiloxane microstructured electrodes that were used in flexible capacitive pressure sensors.These-1 sensors exhibited an ultra-high sensitivity:19.76 kPa for the low-pressure range of 0-100 Pa.Their minimum detection threshold was 1.9 Pa,and they maintained stability and resilience over 10,000 test cycles.These sensors proved to be adept at capturing physiological signals and providing tactile feedback,thereby emphasizing their practical value.

关 键 词：Laser speckle Grayscale lithography Random conical array Microstructured electrode Flexible capacitive pressure sensor. 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]