A shoe-box-sized 3D laser nanoprinter based on two-step absorption  

作　　者：Tobias Messer Michael Hippe Jingya(Lilyn)Gao Martin Wegener 

机构地区：[1]Institute of Applied Physics(APH),Karlsruhe Institute of Technology(KIT),76128 Karlsruhe,Germany [2]Institute of Nanotechnology(INT),Karlsruhe Institute of Technology(KIT),76128 Karlsruhe,Germany

出　　处：《Light(Advanced Manufacturing)》2024年第2期115-122,共8页光（先进制造）（英文）

基　　金：We thank Vincent Hahn,Michael Thiel(Nanoscribe),and Matthias Blaicher(Nanoscribe)for discussions.We acknowledge funding by the Deutsche Forschungsgemeinschaft(DFG,German Research Foundation)under Germany’s Excellence Strategy for the Excellence Cluster“3D Matter Made to Order”(2082/1-390761711);by the Carl Zeiss Foundation,by the Helmholtz program“Science and Technology of Nanosystems”,by the Karlsruhe School of Optics and Photonics(KSOP),by the Max Planck School of Photonics(MPSP);by Nanoscribe-A BICO company.

摘　　要：State-of-the-art commercially available 3D laser micro-and nanoprinters using polymeric photoresists based on two-or multi-photon absorption rely on high-power pico-or femtosecond lasers,leading to fairly large and expensive instruments.Lately,we have introduced photoresists based on two-step absorption instead of two-photon absorption,allowing for the use of small and inexpensive continuous-wave 405 nm wavelength GaN semiconductor laser diodes with light-output powers below 1 mW.Here,using the identical photoresist system and similar laser diodes,we report on the design,construction,and characterization of a 3D laser nanoprinter that fits into a shoe box.This shoe box contains all optical components,namely the mounted laser,the collimation-and beam-shaping optics,a miniature MEMS xy-scanner,a tube lens,the focusing microscope objective lens(NA=1.4,100×magnification),a piezo slip-stick z-stage,the sample holder,a camera monitoring system,LED sample illumination,as well as the miniaturized control electronics employing a microcontroller.We present a gallery of example 3D structures printed with this instrument.We achieve about 100 nm lateral spatial resolution and focus scan speeds of about 1 mm/s.Potentially,our shoe-box-sized system can be made orders of magnitude less expensive than today’s commercial systems.

关 键 词：Two-step absorption Direct laser writing 3D laser nanoprinters Micro-electro-mechanical-systems scanner 3D nanostructures 

分 类 号：TN24[电子电信—物理电子学]