A multi-photon(7×7)-focus 3D laser printer based on a 3D-printed diffractive optical element and a 3D-printed multi-lens array  

作　　者：Pascal Kiefer Vincent Hahn Sebastian Kalt Qing Sun Yolita M.Eggeler Martin Wegener 

机构地区：[1]DMM2O-Cluster of Excellence,Karlsruhe Institute of Technology(KIT)and Heidelberg University,76128 Karlsruhe,Germany [2]Institute of Applied Physics(APH),Karlsruhe Institute of Technology(KIT),76128 Karlsruhe,Germany [3]Institute of Nanotechnology(INT),Karlsruhe Institute of Technology(KIT),76128 Karlsruhe,Germany [4]Laboratory for Electron Microscopy(LEM),Karlsruhe Institute of Technology(KIT),76128 Karlsruhe,Germany

出　　处：《Light(Advanced Manufacturing)》2024年第1期26-39,共14页光（先进制造）（英文）

基　　金：funding by the Deutsche Forschungsgemeinschaft(DFG,German Research Foundation)under Germany’s Excellence Strategy for the Excellence Cluster“3D Matter Made to Order”(2082/1-390761711);by the Carl Zeiss Foundation,and by the Helmholtz program Materials Systems Engineering.

摘　　要：One of the challenges in the field of multi-photon 3D laser printing lies in further increasing the print speed in terms of voxels/s.Here,we present a setup based on a 7×7 focus array(rather than 3×3 in our previous work)and using a focus velocity of about 1 m/s(rather than 0.5 m/s in our previous work)at the diffraction limit(40×/NA1.4 microscope objective lens).Combined,this advance leads to a ten times increased print speed of about 108 voxels/s.We demonstrate polymer printing of a chiral metamaterial containing more than 1.7×10^(12) voxels as well as millions of printed microparticles for potential pharmaceutical applications.The critical high-quality micro-optical components of the setup,namely a diffractive optical element generating the 7×7 beamlets and a 7×7 lens array,are manufactured by using a commercial two-photon grayscale 3D laser printer.

关 键 词：3D laser printing Direct laser writing Multi-photon absorption Multi-focus optics Diffractive optical element Lens array 

分 类 号：TN24[电子电信—物理电子学]