用于干涉计算成像的硅交叉混频器设计  

Design of silicon-based cross hybrid for optical interference computation imaging

作　　者：周文杰 冯吉军 于清华[2] ZHOU Wenjie;FENG Jijun;YU Qinghua(School of Optical-Electrical and Computer Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China;Key Laboratory of Intelligent Infrared Perception,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China)

机构地区：[1]上海理工大学光电信息与计算机工程学院,上海200093 [2]中国科学院上海技术物理研究所智能红外感知重点实验室,上海200083

出　　处：《光学仪器》2024年第4期37-45,共9页Optical Instruments

基　　金：国家自然科学基金(11933005);上海市科委地方院校能力建设计划项目(23010503600);上海市高校特聘教授(东方学者)岗位计划(GZ2020015);上海市科委国际科技合作项目(23530730500)。

摘　　要：基于绝缘体上硅平台,设计并制作了一种用于光学干涉计算成像的硅交叉混频器,利用时域有限差分法对多模干涉耦合器和整个器件的结构参数优化仿真。仿真结果表明,输出端口具有良好的透过率。通过光刻工艺制备芯片并进行封装后,采用外加电压的方式对混频器的性能进行表征。测试结果表明:在1551.8 nm的工作波长下,施加电压后,输出光功率与电压呈正弦函数关系,验证了混频器中的干涉相长和干涉相消现象;使得两路输出端口发生π相位变化的电压为2 V,电压调控π相位偏转精度分别为0.991π和1.007π,计算可得相位偏差为0.79°。该器件的尺寸为435μm×80μm,结构简单,成本较低且性能稳定,在干涉成像领域拥有广阔的应用前景。Based on the silicon on insulator platform,a silicon-based cross hybrid used for optical interference computation is designed and produced.Utilizing the structure parameter of the multimode interference coupling and the entire device of the finite-difference time-domain method,the simulation results indicated the ports of the output have a good transmission rate.After preparing the chip using the lithography process and packaging,the performance of the hybrid was characterized by an external voltage.The test results showed that at the working wavelength of 1551.8 nm,after the voltage was applied,the output light power and voltage were in a sinusoidal style,verifying the phenomenon of constructive interference and destructive interference.The voltage that caused theπphase change of the two output ports was 2 V,and the voltage regulationπphase deviation accuracy was 0.991πand 1.007πrespectively.The calculated phase deviation was 0.79°.The device size is 435μm×80μm.This device has a simple structure,low cost,and stable performance,which has broad application prospects in the field of interference imaging.

关 键 词：硅交叉混频器 多模干涉耦合器 相位偏差 干涉成像 

分 类 号：TN256[电子电信—物理电子学]