基于交变磁场的平面二维时栅位移传感机理及测量模型  

Displacement sensing mechanism and measurement model of planar two-dimensional time-grating based on alternating magnetic field

作　　者：陈自然[1,2,3,4] 欧阳辉 张桁潇 彭凯 王伟[1,3] 崔南川 CHEN Ziran;OUYang hui;ZHANG Hengxiao;PENG Kai;WANG Wei;CUI Nanchuan(Engineering Research Center of Mechanical Testing Technology and Equipment,Ministry of Education,Chongqing University of Technology,Chongqing 400054,China;CCTEG Chongqing Research Institute,Chongqing 400039,China;Chongqing Key Laboratory of Time-Grating Sensing and Advanced Testing Technology,Chongqing 400054,China;College of Optoelectronic Engineering,Chongqing University,Chongqing 400039,China)

机构地区：[1]重庆理工大学机械检测技术与装备教育部工程研究中心,重庆400054 [2]中煤科工集团重庆研究院有限公司,重庆400039 [3]时栅传感及先进检测技术重庆市重点实验室,重庆400054 [4]重庆大学光电工程学院,重庆400039

出　　处：《光学精密工程》2024年第17期2612-2624,共13页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.52175495);重庆市自然科学基金资助项目(No.CSTB2023NSCQLZX0088);重庆英才项目(No.cstc2022ycjh-bgzxm0098,No.cstc2022ycjh-bgzxm0146)。

摘　　要：针对传统的平面二维位移传感器在超精密光刻、大面积传感器制造中存在的技术瓶颈,提出一种基于空间交变磁场的平面二维位移测量方法。在定尺平面布置均匀等间距的正弦/余弦激励绕组,施加时间正交激励电流,构建空间二维交变磁场,建立空间二维位移和时间基准的映射关系。通过“维度判断+位移解耦”的组合测量模型实现平面二维位移测量,利用动尺维度判断感应绕组阵列输出信号经二值化后的组合逻辑来判断维度;利用动尺两维差动布置的位移感应绕组阵列拾取交变磁场,得到空间位移行波信号,通过比相实现二维位移解耦。通过电磁仿真,对平面二维时栅位移测量模型进行误差分析。研制样机并搭建了实验平台,实验结果表明,传感器在120 mm×120 mm的有效测量范围内,X方向测量误差最大不超过±9.4μm,Y方向测量误差最大不超过±9.7μm,两维度位移测量分辨力为0.15μm。利用毫米级尺寸的激励和感应绕组实现平面二维微米级测量精度,从原理上突破了传统平面二维位移传感器对超精密光刻的制约,降低了传感器加工难度,具有重要的理论研究意义和工程应用价值。To address the limitations of traditional planar two-dimensional displacement sensors in ultraprecision lithography and large-area sensor manufacturing,a new method using a spatial alternating mag⁃netic field is proposed.This method involves arranging uniform sine/cosine excitation windings on a fixed ruler and applying time-quadrature electric current to these windings,creating a two-dimensional alternat⁃ing magnetic field that links spatial displacement with a time reference.The method achieves spatial dis⁃placement measurement through a model of"dimension judgment+displacement decoupling."Dimension judgment is performed using the binary output signals from a dimension-judgment induction winding array.The alternating magnetic field is detected by a displacement-decoupling induction winding array arranged in two dimensions,producing spatial traveling-wave signals and enabling displacement decoupling via phase comparison.Error analysis of this two-dimensional time-grating displacement measurement model was conducted through electromagnetic simulation.A prototype and experimental platform were devel⁃oped,demonstrating that within a 120 mm×120 mm range,the maximum measurement errors were±9.4μm in the X direction and±9.7μm in the Y direction,with a resolution of 0.15μm.This method achieves micron-level measurement accuracy using millimeter-sized excitation and induction windings,overcoming the limitations of traditional sensors in ultra-precision lithography and simplifying sensor manu⁃facturing.The research holds significant theoretical and practical value.

关 键 词：二维位移测量 交变磁场 时栅传感器 组合测量 

分 类 号：TH711[机械工程—测试计量技术及仪器]