在片S参数计量比对结果浅析  

Analysis of the Measurement Comparison Results of On-wafer S-parameters

作　　者：刘晨[1] 高岭[1] 栾鹏[1] 陈婷 黄英龙 李艳奎[4] 金诚 邹喜跃 陆景 陈科元 LIU Chen;GAO Ling;LUAN Peng;CHEN Ting;HUANG Yinglong;LI Yankui;JIN Cheng;ZOU Xiyue;LU Jing;CHEN Keyuan(The 13 th Research Institute of China Electronics Technology Group Corporation,Shijiazhuang,Hebei 050051,China;Beijing Institute of Radio Metrology and Measurement,Beijing 100029,China;China Institute of Electronic Technology Standardization,Beijing 100176,China;Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China;The 14 th Research Institute of China Electronics Technology Group Corporation,Nanjing,Jiangsu 210013,China;Hunan Shibian Communication Technology Co.,Ltd.,Xiangtan,Hunan 411104,China;Huameibo Technology(Beijing)Co.,Ltd.,Beijing 100097,China;Hebei Xiong'an Taixin Electronic Technology Co.,Ltd.,Baoding,Hebei 071799,China)

机构地区：[1]中国电子科技集团公司第十三研究所,河北石家庄050051 [2]北京无线电计量测试研究所,北京100854 [3]中国电子技术标准化研究院,北京100176 [4]中国科学院微电子研究所,北京100029 [5]中国电子科技集团公司第十四研究所,江苏南京210013 [6]湖南时变通讯科技有限公司,湖南湘潭411104 [7]华美博科技(北京)有限公司,北京100097 [8]河北雄安太芯电子科技有限公司,河北保定071799

出　　处：《计量学报》2024年第9期1401-1406,共6页Acta Metrologica Sinica

摘　　要：中国电子科技集团公司第十三研究所作为主导实验室开展了在片S参数计量比对工作,对参比实验室提交的在片S参数测量结果进行了汇总分析,并用E_n值对各参比实验室测量结果进行了评价。通过在片S参数计量比对,确保了量值传递的准确、可靠,特别是对在片S参数测量不确定度的主要来源统一了认识。同时也为业内提供了在片S参数测量一致性的比较平台。As the leading laboratory,the 13 th Research Institute of China Electronics Technology Group Corporation carried out the measurement comparison of on-wafer S-parameters,summarized and analyzed the measurement results of on-wafer S-parameters submitted by the joined laboratories,and evaluated the measurement results of each laboratory with E n.Through the measurement comparison of the on-wafer S-parameters,the accuracy and reliability of the transmission of the quantities are ensured,especially the main sources of the measurement uncertainty of the on-chip S-parameters are unified.At the same time,it also provides the industry with a comparison platform for the consistency of on-chip S-parameter measurement.

关 键 词：无线电计量 在片S参数 计量比对 矢量网络分析仪 

分 类 号：TB973[一般工业技术—计量学]