Generation and Applications of a Broad Atomic Oxygen Beam with a High Flux-Density via Collision-lnduced Dissociation of O_(2)  

作　　者：Zhiqiang Han Liying Song Po-Wan Shum Woon-Ming Lau 

机构地区：[1]Beijing Advanced Innovation Center for Materials Genome Engineering,Center for Green Innovation,School of Mathematics and Physics,University of Science and Technology Beijing,Beijing100083,China [2]Shunde Innovation School,University of Science and Technology Bejing,Foshan,Guangdong 528399,China [3]School of Chemistry and Chemical Engineering,Linyi University,Linyi,Shandong 276000,China [4]The Sun Age(Guangdong)New Energy Ltd,Zhuhai,Guangdong 519031,China

出　　处：《Chinese Journal of Chemistry》2024年第17期2010-2016,共7页中国化学（英文版）

基　　金：support from National Natural Science Foundation of China(NSFC No.22008007);Scientific and Technological Innovation Foundation of Shunde Graduate School,USTB(BK21BEO10);Foshan Science and technology Innovation Project(No.2018IT100363)。

摘　　要：We detail the generation of a pulsed atomic oxygen(AO)broad beam with a high flux-density via collision-induced dissociation of O_(2) to support practical industrial exploitation of AOs,particularly for facilitating 2-dimenstional oxidation/etching at a fast rate of one-monolayer per second in an area≥1000 cm².This innovation fuses the following interdisciplinary concepts:(a)a high density of O^(*) can be produced in an electron-cyclotron-resonance(ECR)O2 plasma;(b)o^(*) can be extracted and accelerated with an aperture-electrode in the plasma.

关 键 词：COLLISION Atomic oxygen Ab initio calculations lon-molecule reactions Gas-phase reactions 

分 类 号：O6[理学—化学]