TiO_(2)/Au复合薄膜的制备及其在平板电极的应用  

Preparation of TiO_(2)/Au Composite Films for Planar Electrode

作　　者：梅玉盈 雷兵 潘瑶[1,2] 罗一鸣 杨开勇[1,2] 贾永雷 MEI Yuying;LEI Bing;PAN Yao;LUO Yiming;YANG Kaiyong;JIA Yonglei(College of Advanced Interdisciplinary Studies,National University of Defense Technology,Changsha 410073,China;Nanhu Laser Laboratory,National University of Defense Technology,Changsha 410073,China)

机构地区：[1]国防科技大学前沿交叉学科学院,长沙410073 [2]国防科技大学南湖之光实验室,长沙410073

出　　处：《硅酸盐学报》2024年第10期3263-3272,共10页Journal of The Chinese Ceramic Society

基　　金：国家自然科学基金(62103423);湖南省自然科学基金(2023JJ30638)。

摘　　要：针对当前半球谐振陀螺平板电极表面吸附有机杂质问题,利用TiO_(2)薄膜的光催化性质,设计了一种TiO_(2)/Au复合薄膜结构以减弱平板电极表面有机物的存在,提高平板电极表面薄膜质量。通过射频磁控溅射法在熔融石英衬底上制备了不同厚度(80~327 nm)的TiO_(2)薄膜,利用表征手段对TiO_(2)薄膜的晶体结构、晶粒大小、表面形貌、吸光特性和光催化性能进行研究,结果表明:厚度为240 nm的TiO_(2)薄膜具有较好的结晶度,合适的晶粒尺寸,最小的禁带宽度,从而具有最佳光催化活性。最后通过实验验证TiO_(2)/Au复合薄膜结构的平板电极的力学性能和光催化性,结果表明:TiO_(2)/Au复合薄膜满足平板电极表面膜层结合力要求,有助于提升表面膜层的耐摩擦性能,同时具有优异的降解有机物的性能,能够减小有机杂质对电容均匀性的影响,为高精度谐振陀螺的研制提供技术支撑。Introduction The gyroscope operation relies on the electrostatic actuation and capacitance detection between the resonator and the planar electrode,with a typical gap ranging from 20-150μm.When organic impurities adhere to planar electrode’s surface,gap’s capacitance changes,leading to fluctuations in the excitation detection signal and thereby affecting the accuracy and reliability of the gyroscope.TiO_(2) thin film can effectively degrade organic pollutants through photocatalytic reactions.However,little research on its application on the surface of high-precision devices has been reported yet.The thickness of the TiO_(2) thin film affects the generation and effective separation of photo-generated electron-hole pairs,thereby influencing the photocatalytic performance of the TiO_(2) thin film.It is thus necessary to determine the thickness of the TiO_(2) thin film on the surface of the planar electrode through experiments.In this paper,a TiO_(2)/Au composite thin film was designed to reduce the adsorption of organic substances on the surface of planar electrode and improve the thin film quality on the planar electrode surface.Methods TiO_(2) thin films with different thicknesses were prepared on fused quartz substrates via radio frequency magnetron sputtering.The films were characterized by X-ray diffraction(XRD),scanning electron microscopy(SEM),atomic force microscopy(AFM),UV-visible spectrophotometry(UV-Vis),and photocatalytic reaction analysis.The crystalline structure,grain size,surface morphology,and optical absorption characteristics of the TiO_(2) thin films were analyzed to assess their impacts on the photocatalytic performance.The optimal thickness of the TiO_(2) thin film suitable for the surface of the planar electrode was determined to be 240 nm.Finally,the planar electrode with a TiO_(2)/Au composite thin film was fabricated.The surface film layer of the planar electrode was characterized by nanoindentation,nano-scratching,and photocatalytic reaction equipment.The exceptional performance of th

关 键 词：谐振陀螺 平板电极 二氧化钛薄膜 光催化 自清洁 

分 类 号：O484[理学—固体物理] V241.554[理学—物理]