Progress in high-performance stick-slip piezoelectric actuators: a review  

作　　者：Yingqi Lin Dawei An Zhenyu Lin Xiaoting Chen Weiqing Huang 

机构地区：[1]School of Mechanical and Electrical Engineering,Guangzhou University,Guangzhou,China [2]School of Computer and Information,Qiannan Normal University for Nationalities,Duyun,China

出　　处：《International Journal of Smart and Nano Materials》2024年第3期652-696,共45页国际智能和纳米材料杂志（英文）

基　　金：supported by the National Natural Science Foundation of China [No.52075108,52105177];the Natural Science Foundation of Guangdong Province,China [No.2022A1515011875];the Young innovative talents project of general colleges and universities in Guangdong Province,China [No.2021KQNCX067].

摘　　要：The ultra-precision field is popular for its micro-nanometer positioning accuracy and large working stroke.Piezoelectric actuators based on the stick-slip operational principle exhibit superior performance characteristics,making them stand out with unique advantages in this field.This paper provides a comprehensive review of the developments in stick-slip piezoelectric actuators over recent years.Starting with a detailed explanation of their operating principles,the article proceeds with a brief introduction to the more commonly used driving waveforms and their applications.Subsequently,various design and optimization technologies for existing com-pliant mechanisms are presented.Furthermore,stick-slip piezoelectric actuators are categorized based on different motion forms,including linear,rotary,and multi-degree of freedom types.Each category is thoroughly examined in terms of structural design and performance features.Following this,the discussion shifts toward controller method research and friction modeling analysis,featuring a particular emphasis on the advancements related to displacement back-lash suppression studies.This systematic summary aims to provide a reference for researchers within related fields,thereby facilitating the further development and application of stick-slip piezoelectric actuators.

关 键 词：Piezoelectric actuator stick-slip motion principle flexure mechanism positioning accuracy 

分 类 号：TB383[一般工业技术—材料科学与工程]