A compact route for efficient production of high-purity β-Ga_(2)O_(3) powder  

作　　者：Xiao-Wei Zhou Gao-Jie Chen Liang Xu Zhi-Jun Shao Cheng Yang Yong-Pan Tian Zhuo Zhao 

机构地区：[1]School of Metallurgical Engineering,Anhui University of Technology,Ma'anshan 243032,China [2]Low-Carbon Research Institute,Anhui University of Technology,Ma'anshan 243032,China

出　　处：《Rare Metals》2024年第9期4573-4584,共12页稀有金属（英文版）

基　　金：supported by the National Natural Science Foundation of China(No.51904003);the Key Research and Development Plan of Anhui Province(No.2022n07020004);the Natural Science Foundation of Anhui Province(Nos.2308085ME156 and 2108085J26);Anhui Provincial Department of Education(No.2022AH050332)。

摘　　要：The present study has proposed a compact process for the production of high-purity β-Ga_(2)O_(3)powder by simply using gallium metal and water as the raw materials.The process basically consists of two essential steps including hydrothermal synthesis of Ga OOH and calcination of Ga OOH for the production of the target product of β-Ga_(2)O_(3).Thermodynamic evaluation and systematic experiments were conducted for process parameter optimization.X-ray diffractometer(XRD),scanning electron microscopy(SEM),thermogravimetryDdifferential scanning calorimetry(TG-DSC)and X-ray photoelectron spectroscopy(XPS)were utilized to clarify the reaction mechanisms of the hydrothermal synthesis and transformation of Ga OOH to β-Ga_(2)O_(3)by calcination.Chemical analysis of the final product of β-Ga_(2)O_(3)obtained under the optimal conditions was carried out with inductively coupled plasma mass spectrometry(ICP-MS),and the results showed that the contents of the representative impurities such as Ni,Cu,In,Mn,Co,Zn and Cr are obviously lower than the requirement of 5N β-Ga_(2)O_(3)standard,exhibiting excellent application prospect of the proposed process to produce high-purity β-Ga_(2)O_(3).

关 键 词：β-Ga_(2)O_(3) Hydrothermal synthesis CALCINATION PURITY Reaction mechanism 

分 类 号：TN304[电子电信—物理电子学]