高于居里温度极化的硬性PZT压电陶瓷的制备及叠层驱动器性能研究  

Preparation and Properties of Hard PZT Piezoelectric Ceramics Poled above Curie Temperature and Multilayer Actuators

作　　者：江强 施立志 陈政燃 周志勇[1] 梁瑞虹[1] JIANG Qiang;SHI Lizhi;CHEN Zhengran;ZHOU Zhiyong;LIANG Ruihong(Key Laboratory of Inorganic Functional Materials and Devices of CAS,Shanghai Institute of Ceramics,Chinese Academy of Sciences,Shanghai 200050,China;College of Materials Science and Opto-Electronic Technology,University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院上海硅酸盐研究所,中国科学院无机功能材料与器件重点实验室,上海200050 [2]中国科学院大学材料科学与光电技术学院,北京100049

出　　处：《无机材料学报》2024年第10期1091-1099,共9页Journal of Inorganic Materials

基　　金：国家重点研发计划(2022YFF0709702);国家自然科学基金(U2241242)。

摘　　要：压电叠层驱动器具有低驱动电压、大位移的特点,被广泛应用于诸多领域。作为目前压电叠层驱动器中最常使用的材料,软性锆钛酸铅(PZT)陶瓷较大的介电常数和损耗往往会导致较高的功耗和发热量,进而影响驱动器的疲劳特性和稳定性。为了制备出低发热量、适用于压电叠层驱动器的压电陶瓷,本工作选取Mn掺杂(摩尔分数)的Pb(Sb_(1/2)Nb_(1/2))_(0.02)Zr_(0.51)Ti_(0.47)O_(3)-0.6%MnCO_(3)(PSN-PZT)硬性压电陶瓷作为基体材料,通过掺入一定含量的Li_(2)CO_(3)烧结助剂来降低陶瓷的烧结温度,并采用高于居里温度极化工艺进一步提升陶瓷的电学性能。最后采用该材料,利用流延工艺制备出压电叠层驱动器,并与相同工艺制备的Pb(Mg_(1/3)Nb_(2/3))_(0.25)(Ti_(0.48)Zr_(0.52))_(0.75)O_(3)(PMN-PZT)驱动器进行比较。结果显示,Li_(2)CO_(3)通过引入液相烧结的方式将PSN-PZT陶瓷烧结温度降低至1050℃。当Li_(2)CO_(3)含量为0.1%(质量分数)时,高于居里温度极化的PSN-PZT陶瓷电学性能最优,其压电系数(d33)和2 kV/mm电场下的单极应变分别为388 pC/N和0.13%。在200 Hz下,PSN-PZT驱动器温升比PMN-PZT驱动器低大约20℃,且经过5×10^(6)次循环后应变仅降低6%。这表明Li_(2)CO_(3)低温烧结的PSN-PZT陶瓷不仅具备不错的压电性能,而且在发热和疲劳特性方面有较大优势,在大功率、高频等苛刻工况中有潜在的应用前景。Piezoelectric multilayer actuators feature large displacement generation at a relatively low driving voltage and are widely used in various fields.As the most commonly used material in multilayer actuators,soft lead zirconate titanate(PZT)ceramics have higher dielectric constant and loss,which often lead to higher power consumption and heat generation that in turn affect fatigue characteristics and stability of piezoelectric multilayer actuators.In this work,Mn-doped(in mole fraction)Pb(Sb_(1/2)Nb_(1/2))_(0.02)Zr_(0.51)Ti_(0.47)O_(3)-0.6%MnCO_(3)(PSN-PZT)hard ceramic was selected as base material in order to prepare piezoelectric ceramics that have low heat generation and are suitable for the application of piezoelectric multilayer actuator.Certain amount of Li_(2)CO_(3) was doped as sintering aid for lowering sintering temperature of ceramics,and above-Curie-temperature polarization was utilized to enhance electric properties of ceramics.Eventually,multilayer actuator composed of this material was fabricated via tape-casting process and compared with Pb(Mg_(1/3)Nb_(2/3))_(0.25)(Ti_(0.48)Zr_(0.52))_(0.75)O_(3)(PMN-PZT)actuator prepared with the same parameters.The results indicated that the sintering temperature of PSN-PZT ceramic was decreased to 1050℃due to Li_(2)CO_(3) sintering aid,which introduced liquid sintering during the sintering process.PSN-PZT ceramics poled above the Curie temperature obtained optimal electric performance with 0.1%(in mass)Li_(2)CO_(3) doping,and the piezoelectric coefficient(d33)and unipolar strain at 2 kV/mm reached 388 pC/N and 0.13%,respectively.The results of temperature rise and strain degradation of both multilayer actuators indicated that the temperature rise of hard PSN-PZT actuator was about 20℃lower than that of PMN-PZT actuator under 200 Hz and the strain decreased by 6%after 5×10^(6) cycles.It indicates that PSN-PZT ceramics with Li_(2)CO_(3) doping for lowering sintering temperature have some advantages in heat generation and fatigue characteristic while having des

关 键 词：硬性PZT 低温烧结 压电叠层驱动器 温升 疲劳特性 

分 类 号：TQ174[化学工程—陶瓷工业]