光学元件表面疵病视觉检测与评价方法研究  

Visual Inspection and Evaluation Methods for Surface Defects of Optical Elemen

作　　者：冯琰 敬娟 王雯 张勇 祝捷 李宏 雷骏诚 赵琰 FENG Yan;JING Juan;WANG Wen;ZHANG Yong;ZHU Jie;LI Hong;LEI Jun-cheng;ZHAO Yan(North Electro-optics Co.,Ltd.,Xi'an 710043,China)

机构地区：[1]西安北方光电股份有限公司,陕西西安710043

出　　处：《光学与光电技术》2024年第5期79-87,共9页Optics & Optoelectronic Technology

摘　　要：表面疵病是评估光学元件表面质量的重要标准,主要包括划痕和麻点.为了准确评估光学元件的表面质量,提出了一种基于机器视觉的检测与评价方法.根据暗场散射成像原理,搭建了图像采集系统,并通过数字图像处理技术设计了疵病识别系统.基于质量检测标准编写了数字化评价系统,实现了对光学元件表面疵病的检测.实验结果显示,该检测方法对光学元件表面质量的评价结果与人工评价结果一致,匹配度达到 100%,验证了方法的可靠性,有助于实现光学元件表面质量的数字化评价.Surface defects are important criteria for evaluating the surface quality of optical components,mainly including scratches and pitting.To accurately evaluate the surface quality of optical components,this paper proposes a detection and evaluation method based on machine vision.Based on the principle of dark field scattering imaging,an image acquisition system is built,and a defect recognition system is designed using digital image processing technology.A digital evaluation system based on quality inspection standards has been developed to detect surface defects of optical components.The experimental results show that the evaluation results of the detection method on the surface quality of optical components are consistent with the manual evaluation results,and the matching degree reaches 100%,which verifies the reliability of the method.

关 键 词：表面疵病 光学元件 暗场散射成像 疵病识别 质量评价 

分 类 号：TP391.41[自动化与计算机技术—计算机应用技术]