基于背景纹影的气液界面行为特性可视化  

Visualization of the Gas-liquid Interface Behavior Based on Background Oriented Schlieren Technique

作　　者：任政钢 祝昊杰 苏芮 申英男 胡亮[1] REN Zhenggang;ZHU Haojie;SU Rui;SHEN Yingnan;HU Liang(State Key Laboratory of Fluid Power and Mechatronic Systems,Zhejiang University,Hangzhou,Zhejiang 310030)

机构地区：[1]浙江大学流体动力与机电系统国家重点实验室,浙江杭州310030

出　　处：《液压与气动》2024年第10期38-44,共7页Chinese Hydraulics & Pneumatics

基　　金：浙江省自然科学基金重大项目(LD24E050008);国家自然科学基金面上项目(52075475);国家自然科学青年科学基金(52105071);中央高校基本科研业务费专项(226-2024-00155)。

摘　　要：气密封技术是维持浸没流场稳定性的主要机制。气体射流冲击晶圆表面,防止浸没液体泄漏造成套刻误差和曝光缺陷。因此,浸没流场和密封气体的相互作用、气-液界面的行为特性亟需研究。采用背景纹影技术观测气体射流,介绍了该可视化技术的测量原理和硬件搭建。通过光路设计实现气-液、内-外流场同步观测,以及界面行为特性研究。对背景纹影技术等非接触式测量技术在超洁净流控中的应用提供指导。Gas sealing technology is the main mechanism for maintaining the stability of the immersion flow field.The gas jet impinges on the wafer surface to prevent the leakage of the immersion liquid,which can lead to overlay errors and exposure defects.The interaction between the immersion flow field and the sealing gas flow and the behavior characteristics of the gas-liquid interface are necessary to investigate.The background oriented schlieren technique is used for observing the gas jet.The measurement principle and hardware construction of this visualization technology are introduced.Through the optimized optical path design,synchronous observation of both the gas-liquid and internal-external flow fields,enabling a comprehensive study of interface behavior characteristics.This study can offer valuable guidance for the application of non-contact measurement techniques such as background oriented schlieren technology in ultra-clean fluidics.

关 键 词：背景纹影 气液界面 流动可视化 

分 类 号：TH137[机械工程—机械制造及自动化] TH138