基于MEMS微镜幅频特性的机械动力学教学实验设计  

Experimental design for teaching mechanical dynamics based on the amplitude–frequency characteristics of a MEMS micromirror

作　　者：何江波 冉龙骐 马蕾 周吴 HE Jiangbo;RAN Longqi;MA Lei;ZHOU Wu(School of Mechanical Engineering,Xihua University,Chengdu 610039,China;School of Mechanical and Electrical Engineering,University of Electronic Science and Technology of China,Chengdu 611731,China)

机构地区：[1]西华大学机械工程学院,四川成都610039 [2]电子科技大学机械与电气工程学院,四川成都611731

出　　处：《实验技术与管理》2024年第10期186-190,共5页Experimental Technology and Management

基　　金：国家自然科学基金项目(52205604);四川省自然科学基金项目(2022NSFSC2013);教育部协同产学研协同育人项目(22107077125449);西华大学研究生教育教学改革与实践项目(YJG202312)。

摘　　要：该文依托华为资助项目搭建了MEMS微镜的幅频特性实验,并将其应用于机械动力学教学实践。首先,通过MEMS微镜的工作原理阐明了相关的机械动力学理论知识。其次,对MEMS微镜幅频特性实验进行了详细论述,包括实验平台构成、微镜角度的光电检测方法、实验数据处理及工程应用。最后,阐述了实验在机械动力学教学中作用,包括激发学习热情、课程思政、提升工程实践和融合创新能力等。[Objective]Under the background of new engineering disciplines,the experimental teaching of mechanical dynamics combined with frontier technology plays an important role in promoting students’engineering practice and multidisciplinary integrating innovation abilities.To realize the combination of MEMS micromirror technology and mechanical dynamics teaching practice and achieve the purpose of design verification and parameter identification of MEMS micromirror,this study relies on a Huawei-funded project to conduct experiments on the amplitude–frequency characteristics of the MEMS micromirror.[Methods]Based on the working principle,the second-order dynamic equation of MEMS micromirror is established,and the MEMS micromirror is considered a typical second-order forced vibration problem.Therefore,its amplitude–frequency characteristics exhibit the resonance phenomenon;that is,when the driving frequency is the same as the natural frequency of the system,the angular amplitude of the micromirror reaches its maximum value.Students understand the theoretical knowledge of forced vibration combined with the experiment and use the knowledge to analyze and design the micromirror,which can promote the students’engineering practice ability.The MEMS micromirror amplitude–frequency experimental platform mainly includes an electromagnetically driven micromirror,laser source,photodetector,and signal processing board.The photodetector is realized by integrating a photodiode and a Gaussian light source.The light emitted by the Gaussian light source is reflected by the mirror attached to the back of the micromirror to the photodiodes,which are integrated with the light source into the same board.Then,the photodiodes generate an electric current through the photoelectric effect.The photodiode current passes through signal processing modules,such as amplification,low-pass filtering,and analog-to-digital conversion,to generate the output signals.When the MEMS micromirror is twisted,the light spot covering the photodiodes will

关 键 词：机械动力学 MEMS微镜 实验教学 光电检测 课程思政 

分 类 号：TH113[机械工程—机械设计及理论]